New Process

Charge List

Charges are listed in terms of "process units". Each process unit is currently set to $8.50/pu for academic users, representing a subsidized academic rate (external users use a 3x multiplier, MIT.nano consortium members use 2x). This setup allows global adjustments without impacting the relative pricing and allows users to more easily remember tool costs.

** = may vary by material

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NameCategoryFunctionUsage Charge Estimate