Equipment
Lab and Coral NameEML / parametric-tester
ModelHewlett-Packard
SpecialistKurt Broderick    (Gary Riggott)
Physical LocationTBD
Classification
Process CategoryMetrology
SubcategoryElectrical
Material KeywordsCMOS Metals, Non-CMOS Metals
Sample Size6" Wafers, 4" Wafers, Pieces
Alternative?
Keywordssingle wafer, manual load, manual operation, alignment
Description
The parametric-tester is a parametric-tester that measures device characteristics

Best for
Limitations
Characteristics/FOM
Caution with
Machine Charges (academic rate)2pu/hour
Documents
Process Matrix Details


PTC Matrix does not apply for EML
Ever been in EMLSamples from EML are never permitted to return to ICL or TRL