Equipment
Lab and Coral NameICL / P10
ModelTencor/Prometrix P-10
SpecialistEric Lim    (Robert Bicchieri)
Physical Location2F 1-South Metrology
Classification
Process CategoryMetrology
SubcategoryProfile
Material KeywordsNone
Sample Size6" Wafers
Alternativedektak, AFM
Keywordssingle wafer, manual load, top side of sample, manual operation, alignment
Description
The P10 is a stylus (contact) profilometer that is used to measure the surfacce height differences (steps) on samples. This system operates by the stylus physically making contact with the sample surface to measure changes in surface height. This tool is only allowed for Au free samples. In, GaN, or other related materials are not allowed.

Best forCMOS compatible patterns (PR, dielectrics or CMOS metals)
LimitationsCan not measure very small setps on the surface (< 50 nm). For such purposes use AFM.
Characteristics/FOMStylus tip moves over the surface to map the surface topography
Caution withSample surface should be hard enough to avoid any deposits over the tip (e.g if PR is not sufficiently bakes). If not properly handled, the tip may break.
Machine Charges (academic rate)5pu/hour
Documents
Process Matrix Details

Permitted


Not Allowed
Ever been in EMLSamples from EML are never permitted to return to ICL or TRL


For more details or help, please consult PTC matrix, email ptc@mtl.mit.edu, or ask the research specialist (Eric Lim)