Equipment
Lab and Coral NameICL / 5A-GateOx
ModelThermco 10K
SpecialistEric Lim    (Robert Bicchieri)
Physical Location2F 4-North Diffusion
Classification
Process CategoryDiffusion
SubcategoryOxidation
Material KeywordsSiO2
Sample Size6" Wafers, 4" Wafers
AlternativeICL / 5C-FieldOx, ICL / 5D-ThickOx, TRL / A1, TRL / A2, TRL / B3
Keywordsmulti wafer, manual load, multiple pieces, both sides of sample, conformal dep, temperature, manual operation
Description
The 5A-GateOx is an atmospheric diffusion tube-furnace for high-temperature silicon operations. Wafers are loaded into the furnace with an automated cantilever paddle system where they can be exposed to high temperatures (up to 1050C) in various gas ambients. This furnace is for processing of CMOS samples only. This tube does only dry oxidation, and has the highest sample cleanliness level, aimed at gate oxidation.

Best forGrowing gate oxides or thin oxide films on new substrates.
LimitationsCMOS materials only, no metals. 1050C temperature limit, max time 4 hours.
Characteristics/FOMGases available: O2, N2, H2
Caution with
Machine Charges (academic rate)25pu/run + 10pu/um
Documents
Process Matrix Details

Permitted
Been in the SEMA sample viewed in the SEM must have used the appropriate chuck to avoid cross-contamination
(With Appropriate Chuck),
Requires ICL RCA CleanAn RCA clean in ICL was carried out immediately before
(Must do immediately before)

Not Allowed
Ever been in EMLSamples from EML are never permitted to return to ICL or TRL
,
Been in the ALDSamples that have been in any of the ALD systems
,
Pyrex SubstratesPyrex substrates can be a concern due to high sodium content, which contaminates CMOS frontend tools
,
III-V SubstratesAny III-V substrates, e.g. GaAs, GaN, InP, and so on. Note though that many common III-V substrates will also carry the Au flag, but there are some GREEN III-V substrates.
,
Germanium on surfaceSamples with germanium on the surface (typically grown films)
,
Germanium buriedSamples with germanium buried below a different film
,
PiecesWafer pieces may not be handled by the equipment, and are harder to thoroughly clean - preventing them from running in certain tools.
,
Gold or RED color codeRED color code substrates. These are gold-contaminated or have been processed in gold contaminated tools. Gold and other metals can contaminate silicon devices (GREEN color code) and have to be separated.
,
Any exposure to CMOS metalIf the sample had ever seen a CMOS metal (or a tool that accepts CMOS metal), then some frontend tools could be contaminated by this.
,
CMOS metal on surfaceCMOS compatible metals exposed on the surface. These are Al,Ni,Pt,Ti,TiN. Other metals such as Au are *NOT* part of this.
,
CMOS metal buriedCMOS compatible metals covered entirely by a different material. These are Al,Ni,Pt,Ti,TiN. Other metals such as Au are *NOT* part of this.
,
Been in the STS DRIEThe DRIE etch leaves behind polymer residues on the sidewall ripples, which can be a contamination concern for some tools.
,
Been in the Concept1The Concep1 deposits dielectrics on GREEN wafers, however it also accepts metal and there can be cross-contamination for diffusion area
,
Has PhotoresistSamples with photoresist cannot be exposed to high temperatures, which is typical in deposition tools. Outgassing can be a concern.
,
Has PolyimidePolyimide is a very chemically resistant polymer, and can tolerate higher temperatures but cannot be exposed to typical PECVD deposition temperatures or diffusion furnaces. Outgassing can be a concern.
,
Has Cured SU8Not fully cured SU8 residues can heavily contaminated plasma chambers or destroy other user's samples, but fully cured SU8 is permitted in certain tools.
,
Coming from KOHAfter a KOH etch, the samples must receive a special clean because the K ions are highly contaminating to CMOS frontend tools
,
Coming from CMPAfter a CMP, the samples must receive a special clean, because the slurry residues otherwise introduce contamination and particles.
,
Has been past RCA clean for over 4 hoursFor some diffusion furnaces, the samples must immideatly enter the furnace and cannot be stored in a box for a long time.


For more details or help, please consult PTC matrix, email ptc@mtl.mit.edu, or ask the research specialist (Eric Lim)