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All Machines: All Tools

Here is the complete of all equipment. For more specific searches, it may help to narrow down by lab, process category or other keywords.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
  +  
EBL Elionix PhotoExpose Electron beam lithography system
Red &Green
  +  
EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
  +  
NANO ALD-AllPurpose DepositionCVD Atomic Layer Deposition
Red
  +  
NANO Anneal-Tube DiffusionBake Anneal Furnace
Red
  +  
NANO Asher-SoftLitho Photo, SoftLithoClean, PDMS Oxygen Plasma
Red
  +  
NANO Sputter-Balzer DepositionSputter Thin sputter coating of samples
Red
  +  
NANO Anneal-Box DiffusionBake Anneal Furnace
Red
  +  
EML coater-EML PhotoCoat Photoresist Coater
EML
  +  
NANO Dektak-150 Metrology, SoftLithoProfile, SU8 Surface Profilerometer
Red
  +  
NANO EBeam-AJA DepositionEvaporate Metal and dielectric evaporator
Red
  +  
NANO Filmetrics-F20 MetrologyThickness Thin Film Optical Measurement
Red &Green
  +  
EML hotpress PhotoBond Pressing for thermoplastic films
EML
  +  
NANO Ox-Tube-Lindberg DiffusionOxidation Oxidation Furnace
EML
  +  
EML parametric-tester MetrologyElectrical Probe station for electrical measurements
EML
  +  
EML photo-hood-EML WetSolvents Solvent Fume hood for lithography
EML
  +  
EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
  +  
NANO RTA-900C DiffusionBake Rapid Thermal Annealing
Red
  +  
NANO SEM-Neo MetrologySEM Very Basic Electron Microscope
Red
  +  
EML SolventHood-EML WetSolvents Solvent Fume hood for lithography
EML
  +  
NANO Sputter-AJA-ChamberLoad DepositionSputter Sputter deposition tool
Red
  +  
NANO Vacuum-Oven DiffusionBake Temperature controlled vacuum oven
Red
  +  
TRL 2Dtransfer-platingHood WetAcids Electroplating wet bench and fume hood
Red
  +  
ICL 4-pt-probe MetrologyElectrical Sheet resistance measurement of semiconductors
Red
  +  
ICL 5A-GateOx DiffusionOxidation Diffusion tube for gate oxide growth
Green
  +  
ICL 5B-Anneal DiffusionBake Annealing tube
Green
  +  
ICL 5C-FieldOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
  +  
ICL 5D-ThickOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
  +  
ICL 6A-nPoly DiffusionCVD Polysilicon deposition tube for n-type poly Si
Green
  +  
ICL 6B-Poly DiffusionCVD Polysilicon deposition tube for p-type poly Si
Green
  +  
ICL 6C-LTO DiffusionCVD Low temperature CVD oxide deposition
Green
  +  
ICL 6D-Nitride DiffusionCVD Deposition of stoichiometric silicon nitride
Green
  +  
ICL AFM MetrologyProfile Atomic Force Microscope for Surface Analysis
Red &Green
  +  
ICL ALD DepositionCVD Atomic Layer Deposition
Red
  +  
ICL ALD-Oxford DepositionCVD, PECVD Atomic Layer Deposition
Green
  +  
ICL AME5000 EtchRIE RIE etcher for frontend silicon processes
Green
  +  
ICL asher-ICL PhotoClean Single wafer oxygen plasma for photoresist removal
Green
  +  
ICL pTrack PhotoCoat Automated coater and developer track
Green
  +  
ICL concept1 DepositionPECVD PECVD deposition of oxides, nitrides, and TEOS
Green
  +  
ICL cv MetrologyElectrical Electrical characterization of dielectrics
Green
  +  
ICL DCVD DepositionPECVD PECVD deposition of oxides, nitrides, and a-Si
Green
  +  
ICL diesaw PackagingPhysical Wafer dicing saw
Red
  +  
NANO Diesaw-DAD3240 PackagingPhysical Wafer dicing saw
Red
  +  
ICL eBeam-EVO DepositionEvaporate Metal evaporator of CMOS compatible metals
Green
  +  
ICL endura DepositionSputter Metal sputter deposition
Green
  +  
ICL epi-Centura DepositionCVD Not open to public
Green
  +  
NANO CMP-GnP WetOther Chemical Mechanical Polishing to planarize surfaces
Red &Green
  +  
NANO Wirebond-Ball-MEI PackagingPhysical Gold ball bonder for device packaging
Red
  +  
ICL i-stepper PhotoExpose i-line stepper
Red &Green
  +  
ICL LAM490B EtchRIE Chlorine based plasma etching of silicon
Green
  +  
ICL LAM590-ICL EtchRIE Fluorine based plasma etching of silicon oxide and nitrides
Green
  +  
ICL nitrEtch-HotPhos WetAcids Hot phosphoric nitride etch bath
Green
  +  
ICL oxEtch-BOE WetAcids Silicon dioxide etch bath
Green
  +  
ICL Oxford-100_PECVD Deposition, EtchPECVD Dual chamber PECVD and plasma etch tool
Red
  +  
ICL Oxford-100_Etch Deposition, EtchRIE Dual chamber PECVD and plasma etch tool
Red
  +  
ICL P10 MetrologyProfile Stylus profilerometer
Green
  +  
ICL premetal-Piranha WetAcids Piranha resist removal and cleaning station
Green
  +  
ICL rainbow EtchRIE Chlorine based plasma etcher for metals
Green
  +  
ICL rca-ICL DiffusionClean Wafer cleaning before diffusion tubes
Green
  +  
ICL RTA2 DiffusionBake Rapid Thermal Annealing
Green
  +  
ICL RTA-pieces DiffusionBake Rapid Thermal Annealing
Red
  +  
ICL RTP DiffusionBake Rapid Thermal Annealing
Green
  +  
ICL RTP-Si DiffusionBake Rapid Thermal Annealing
Green
  +  
ICL semZeiss MetrologySEM Scanning Electron Microscope
Red &Green
  +  
ICL SM-300 MetrologyThickness Thickness measurement for CMP processing
Red &Green
  +  
ICL TMAH-KOHhood WetAcids Silicon bulk wet etching
Red &Green
  +  
ICL UV1280 MetrologyThickness Thin film characterization
Green
  +  
ICL VTR DiffusionCVD Low stress silicon nitride deposition
Green
  +  
ICL wykoICL MetrologyProfile Optical profiling system
Green
MTL Procedures-Cleaning ProceduresClean Sample Cleaning
Red &Green
MTL Procedures-Deposition ProceduresDeposit Deposition of thin films
Red &Green
MTL Procedures-Etching ProceduresEtch Etching of materials
Red &Green
MTL Procedures-General ProceduresGeneral Broader concepts
Red &Green
MTL Procedures-Lithography ProceduresPhoto Lithography
Red &Green
MTL Procedures-Metrology ProceduresMetrology Test and Measurement
Red &Green
  +  
TRL A1-GateOx DiffusionOxidation Thermal Oxidation for Green Silicon Wafers
Green
  +  
TRL A2-WetOxBond DiffusionOxidation Thermal Oxidation and other thermal process for GREEN Si wafers
Green
  +  
TRL A3-Sinter DiffusionBake Sintering for GREEN Si wafers
Green
  +  
TRL A4-III-Vanneal DiffusionBake Annealing for GREEN III-V samples
Red
  +  
TRL acid-hood WetAcids Acid processing station
Red &Green
  +  
TRL AJA-TRL DepositionSputter Sputter deposition tool
Red
  +  
TRL asherMatrix-TRL PhotoClean Single wafer oxygen plasma for photoresist removal
Red
  +  
TRL asher-TRL PhotoClean Barrel asher for resist removal
Red &Green
  +  
TRL B1-Au DiffusionOxidation Gold compatible anneal tube
Red
  +  
TRL B2-Ox-alloy-Poly DiffusionOxidation Thermal Oxidation and LPCVD Polysilicon for RED wafers
Green
  +  
TRL B3-DryOx DiffusionOxidation Thermal Oxidation
Green
  +  
TRL B4-Poly DiffusionCVD LPCVD polysilicon for Green wafers
Green
  +  
TRL Balzer-Elionix DepositionSputter SEM or EBL sample preparation
Red
  +  
TRL CCNT DepositionPECVD Carbon nanotube growth
Red
  +  
TRL coater PhotoCoat Manual spin-coater for photoresists
Red &Green
  +  
TRL dek-NoAu MetrologyProfile Stylus Profilerometer
Green
  +  
TRL dektak-XT MetrologyProfile Stylus Profilerometer
Red
  +  
TRL develop-Brewer PhotoCoat Resist develop and postbake
Red &Green
  +  
TRL eBeamAu DepositionEvaporate Metal evaporator
Red
  +  
TRL eBeamFP DepositionEvaporate Fast pumping metal evaporator
Red
  +  
TRL ellipsometer-TRL MetrologyThickness Thin film thickness measurement
Red &Green
  +  
NANO MaskAlign-SoftLitho-EV620 Photo, SoftLithoExpose, SU8 Contact mask aligner
Red &Green
  +  
TRL EV501 PhotoBond Bonder system to apply heat, vacuum and pressure
Red &Green
  +  
TRL EV620 PhotoBond Aligner for bonding
Red &Green
  +  
TRL EV-LC PhotoExpose Contact mask aligner
Red &Green
  +  
TRL Filmetrics-TRL MetrologyThickness Thin film thickness measurement
Red &Green
  +  
TRL FLX MetrologyProfile Thin film stress measurement
Red &Green
  +  
TRL Greenflo WetAcids Acid processing station
Red &Green
  +  
TRL Hall-probe MetrologyElectrical Carrier measurement
Red
  +  
TRL Heidelberg PhotoExpose Laser direct-write exposure for wafers and masks
Red &Green
  +  
TRL HMDS-TRL PhotoBake HMDS oven
Red &Green
  +  
TRL hotplate1 PhotoBake Hotplate for lithography
Red &Green
  +  
TRL hotplate2 PhotoBake Hotplate for lithography
Red &Green
  +  
TRL hotplate300 PhotoBake Hotplate for lithography
Red &Green
  +  
TRL IV-probe MetrologyElectrical Probe station with curve tracer for IV measurement
Red
  +  
TRL LAM590-TRL EtchRIE Fluorine based plasma etching of oxide and nitrides
Red
  +  
NANO MaskAlign-MA6 PhotoExpose Contact mask aligner
Red &Green
  +  
TRL DirectWrite-MLA150-OptAF PhotoExpose Direct-write lithography for wafers and larger pieces
Red &Green
  +  
TRL DirectWrite-MLA150-AirAF PhotoExpose Direct-write lithography for wafers and larger pieces
Red &Green
  +  
TRL nanospec MetrologyThickness Thin film thickness measurement
Red &Green
  +  
TRL OAI-Flood PhotoExpose Flood exposure for image reversal resists
Red &Green
  +  
TRL parylene DepositionCVD Parylene depopsition
Red
  +  
TRL photo-wet-Au WetSolvents Solvent fume hood with sonicator
Red &Green
  +  
TRL photo-wet-l WetSolvents Wetbench for photoresist development
Red &Green
  +  
TRL photo-wet-r WetSolvents Wetbench for photoresist development
Red &Green
  +  
TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
  +  
TRL PMMAspinner PhotoCoat Manual coater for PMMA and other photoresists
Red &Green
  +  
TRL postbake PhotoBake Bake oven 120C
Red &Green
  +  
TRL prebakeovn PhotoBake Bake oven 90C
Red &Green
  +  
TRL PZTcoater DepositionSpin-Coat Coater to apply PZT films
Red
  +  
TRL PZTfurnace DepositionBake Bake oven for PZT coated wafers
Red
  +  
TRL rca-TRL DiffusionClean Wafer cleaning before diffusion tubes
Green
  +  
TRL Resonetics PhotoExpose Laser ablation system
Red
  +  
TRL RTA-HiT DiffusionBake Rapid Thermal Annealing
Red
  +  
TRL SAMCO EtchRIE Chlorine based plasma etcher for III-V materials
Red
  +  
TRL SolventHood-TRL WetSolvents Solvent fume hood
Red &Green
  +  
TRL sts1 EtchDRIE Deep reactive ion etcher for silicon
Red
  +  
TRL sts2 EtchDRIE Deep reactive ion etcher for silicon
Green
  +  
TRL sts-CVD DepositionPECVD PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si
Red
  +  
TRL sts-Pegasus EtchDRIE Deep reactive ion etcher for silicon
Red
  +  
TRL SU8oven PhotoBake Oven to dry foil from SU8 coater
Purple
  +  
TRL SU8spinner PhotoCoat Manual spin-coater for SU8 resists
Purple
  +  
TRL TBM-8 PhotoBond Front-to-back alignement measurement
Red &Green
  +  
TRL UVozone-Au EtchClean Cleans residual organics
Red
  +  
TRL varTemp PhotoBake Bake oven for variable temperature
Red
  +  
TRL WYKO MetrologyProfile Optical profiling system
Red &Green
  +  
TRL XeF2 EtchRIE XeF2 isotropic etching of silicon
Red
  +  
NANO Wirebond-Auto PackagingPhysical, LEAP Automated wirebonder
Red
  +  
NANO Wirebond-Ball-Westbond PackagingPhysical, LEAP Manual ball bonder
Red
  +  
NANO Wirebond-Wedge PackagingPhysical, LEAP Manual wedge bonder
Red
  +  
NANO XRay-Inspection PackagingPhysical, LEAP X-Ray imaging
Red
  +  
NANO DieBonder-PickAndPlace PackagingPhysical, LEAP Automated pick and place
Red
  +  
NANO Clean-Ar-Plasma PackagingClean, LEAP Plasma parts cleaning
Red
  +  
NANO Oven-Reflow PackagingBake, LEAP Reflow oven
Red
  +  
NANO Microscope-QuickVision PackagingPhysical, LEAP Automated imaging microscope
Red
  +  
Other OutsideLab ProceduresGeneral Tools used in outside facilities
Red
  +  
Other CNS ProceduresGeneral Tools used in Harvard CNS
Red
  +  
Other NSL ProceduresGeneral Tools used in NSL bldg 39
Red
  +  
Other SNL ProceduresGeneral Tools used in SNL bldg 37
Red
  +  
NANO Freezer-Packaging PackagingPhysical, LEAP 0
Red
  +  
NANO Interference-LloydsMirror LithoExpose 0
Red &Green
  +  
NANO AIR_Bladecoater NanoMatTBD 0
Red
  +  
NANO AIR_FOM NanoMatTBD 0
Red
  +  
NANO AIR_Spincoater NanoMatTBD 0
Red
  +  
NANO GB_Solar_Sim NanoMatTBD 0
Red
  +  
NANO GB_Spincoater NanoMatTBD 0
Red
  +  
NANO GB_Metals_Evaporator NanoMatTBD 0
Red
  +  
NANO GB_Organics_Evaporator NanoMatTBD 0
Red
  +  
NANO Agilent5500_AFM NanoMatTBD 0
Red
  +  
NANO Cary_UV-Vis_Spec NanoMatTBD 0
Red
  +  
NANO Fluorescence_Spec NanoMatTBD 0
Red
  +  
NANO 4_Point_Probe NanoMatTBD 0
Red
  +  
NANO PECVD-Samco-PD220 DepositionPECVD Silicon dielectric PECVD deposition
Red &Green
  +  
NANO RIE-F-Samco-230iP EtchRIE Fluorine based etcher for silicon dielectrics
Red &Green
  +  
NANO Coldplate-Solvent LithoDevelop Coldplate for PMMA developing
Red &Green
  +  
NANO Hotplate-Tower-U10 LithoBake Hotplate tower for pre- and post-baking, up to 300 mm
Red &Green
  +  
NANO Hotplate-Tower-U12 LithoBake Hotplate tower for pre- and post-baking, up to 150 mm
Red &Green
  +  
NANO Oven-PostBake-U10 LithoBake Oven for 120C postbake of photoresists
Red &Green
  +  
NANO Oven-PostBake-U12 LithoBake Oven for 120C postbake of photoresists
Red &Green
  +  
NANO Oven-PreBake-U10 LithoBake Oven for 97C prebake of photoresists
Red &Green
  +  
NANO Oven-PreBake-U12 LithoBake Oven for 97C prebake of photoresists
Red &Green
  +  
NANO Spinner-AllPurpose LithoCoat All purpose spinner for user-supplied resist and small samples
Red &Green
  +  
NANO Spinner-EBL LithoCoat Spinner for white-light compatible ebeam litho resists PMMA and HSQ
Red &Green
  +  
NANO Spinner-Resist LithoCoat Wafer and large pieces spinner with three plumbed resists
Red &Green
  +  
NANO Develop-L08 LithoDevelop Fumehood for resist developing
Red &Green
  +  
NANO Develop-U10 LithoDevelop Fumehood for resist developing
Red &Green
  +  
NANO Develop-U12 LithoDevelop Fumehood for resist developing
Red &Green
  +  
NANO EBL-Spinner-Hood-U06 LithoCoat Solvent fumehood for EBL coating and sample cleaning
Red &Green
  +  
NANO General-Spinner-Hood-U12 LithoCoat Solvent fumehood for spin coating
Red &Green
  +  
NANO Liftoff-L08 LithoClean General purpose solvent hood and liftoff procedures
Red &Green
  +  
NANO Liftoff-L10 LithoClean General purpose solvent hood and liftoff procedures
Red &Green
  +  
NANO PhotoPrep-L10 LithoTBD Solvent fumehood for general purpose lithography preparation
Red &Green
  +  
NANO Resist-Spinner-Hood-U10 LithoCoat Solvent fumehood for spin coating
Red &Green
  +  
NANO Microscope-Inspect-4k MetrologyInspect Inspection microscope with 4k camera, DIC, darkfield, up to 100x objectives
Red &Green
  +  
NANO Microscope-Inspect-HD MetrologyInspect Inspection microscope with HD camera, up to 100x objectives
Red &Green
  +  
NANO Cleave-LatticeAx MetrologyCleave Aligned sample cleaver for precision indenting and cleaving
Red &Green
  +  
NANO Scribe-Backside MetrologyCleave Sample backside scribing tool
Red &Green
  +  
NANO Scribe-Frontside MetrologyCleave Sample frontside scribing tool
Red &Green
  +  
NANO Microscope-Stereo-Packaging MetrologyPhysical Stereoscope for packaging inspection and work
Red &Green
  +  
NANO Solder-Station PackagingPhysical Solder station for surface mount and rework
Red &Green
  +  
NANO Microscope-Stereo-SU8 SoftLithoSU8, Microscope Stereoscope for placing/peeling/cutting of PDMS
Purple
  +  
NANO Mixer-PDMS-Degas SoftLithoPDMS, Mixer Centrifugal mixer for PDMS
Purple
  +  
NANO Oven-PDMS SoftLithoPDMS, Bake Oven for curing PDMS
Purple
  +  
NANO PDMS-Prep SoftLithoPDMS, Fumehood Fumehood for mixing and casting PDMS
Purple
  +  
NANO SoftLitho-Develop SoftLithoSU8, Fumehood SU8 hood for baking
Purple
  +  
NANO SoftLitho-Prep SoftLithoPDMS, Fumehood Fumehood for cleaning and preparing samples for SU8 and PDMS work
Purple
  +  
NANO Spinner-SU8 SoftLithoSU8, Coat SU8 spin coater with plumbed developer/rinse/ebr
Purple
  +  
NANO SU8-Spinner-Hood SoftLithoSU8, Fumehood Fumehood for SU8 spinning and solvent work
Purple
  +  
NANO SRD-L06 WetClean Spin rinse drier for 4, 6, and 8 inch wafers
Red &Green
  +  
NANO SRD-U10 WetClean Spin rinse drier for 4, 6, and 8 inch wafers
Red &Green
  +  
NANO Acid-Etch-General-U10 WetEtch Acid hood for general purpose acid work
Red &Green
  +  
NANO Acid-Extended-U07 WetEtch Acid hood for longer runs
Red &Green
  +  
NANO Acid-PostCMP-U07 WetClean Acid hood for post-CMP sample cleaning
Red &Green
  +  
NANO Acid-PreClean-U06 WetClean Acid bench for RCA and piranha cleaning of up to 6 inch wafers
Red &Green
  +  
NANO NitrideEtch-Phos-L06 WetEtch Acid bench for etching Si3N4 in hot phosphoric acid
Red &Green
  +  
NANO OxideEtch-HF-BOE-L06 WetEtch Acid bench for etching SiO2 in BOE and HF
Red &Green
  +  
NANO Piranha-L06 WetClean Acid bench for piranha cleaning
Red &Green
  +  
NANO Piranha-U10 WetClean Acid bench for piranha cleaning
Red &Green
  +  
NANO Plating-U04 WetTBD Electroplating wet bench and fume hood
Red &Green
  +  
NANO RCA-Diffusion-L02 WetClean Acid bench for RCA cleaning before diffusion
Red &Green
  +  
NANO RCA-General-L06 WetClean Acid bench for RCA cleaning
Red &Green
  +  
NANO SiliconEtch-KOH-L06 WetEtch Corrosive bench for Si etching with KOH
Red &Green
  +  
NANO Solvent-Clean-U06 WetClean Solvent fumehood for sample cleaning including megasonic and CO2
Red &Green
  +  
NANO Solvent-L06 WetClean Solvent hood for general purpose solvent work
Red &Green
  +  
NANO Ops-ParticleCounter WetClean Particle Counter for staff use
Red &Green
  +  
NANO Computers WetClean Desktop computers in the lab
Red &Green