New Process

Machines by Sample Size: Pieces

Anything that is not a 150mm or 100mm wafer. Pieces can be any shape or size. Smaller than 3 mm or irregular shaped pieces are more challenging to process (e.g. when coating). See the spinning substrate keyword.
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ProcessLabToolKeywords0Description
Color Code
  +  
EBL Elionix ERRORERROR Electron beam lithography system
Red &Green
  +  
EML acid-hood-EML ERRORERROR General Purpose Acid Fume-Hood
EML
  +  
NANO ALD-AllPurpose ERRORERROR Atomic Layer Deposition
Red
  +  
NANO Anneal-Tube ERRORERROR Anneal Furnace
Red
  +  
NANO Asher-SoftLitho ERRORERROR Oxygen Plasma
Red
  +  
NANO Sputter-Balzer ERRORERROR Thin sputter coating of samples
Red
  +  
NANO Anneal-Box ERRORERROR Anneal Furnace
Red
  +  
EML coater-EML ERRORERROR Photoresist Coater
EML
  +  
NANO Dektak-150 ERRORERROR Surface Profilerometer
Red
  +  
NANO EBeam-AJA ERRORERROR Metal and dielectric evaporator
Red
  +  
NANO Filmetrics-F20 ERRORERROR Thin Film Optical Measurement
Red &Green
  +  
EML hotpress ERRORERROR Pressing for thermoplastic films
EML
  +  
NANO Ox-Tube-Lindberg ERRORERROR Oxidation Furnace
EML
  +  
EML parametric-tester ERRORERROR Probe station for electrical measurements
EML
  +  
EML photo-hood-EML ERRORERROR Solvent Fume hood for lithography
EML
  +  
EML plasmatherm ERRORERROR Plasma Etch and Deposition
EML
  +  
NANO RTA-900C ERRORERROR Rapid Thermal Annealing
Red
  +  
NANO SEM-Neo ERRORERROR Very Basic Electron Microscope
Red
  +  
EML SolventHood-EML ERRORERROR Solvent Fume hood for lithography
EML
  +  
NANO Sputter-AJA-ChamberLoad ERRORERROR Sputter deposition tool
Red
  +  
NANO Vacuum-Oven ERRORERROR Temperature controlled vacuum oven
Red
  +  
TRL 2Dtransfer-platingHood ERRORERROR Electroplating wet bench and fume hood
Red
  +  
ICL AFM ERRORERROR Atomic Force Microscope for Surface Analysis
Red &Green
  +  
ICL ALD ERRORERROR Atomic Layer Deposition
Red
  +  
ICL ALD-Oxford ERRORERROR Atomic Layer Deposition
Green
  +  
ICL diesaw ERRORERROR Wafer dicing saw
Red
  +  
NANO Diesaw-DAD3240 ERRORERROR Wafer dicing saw
Red
  +  
ICL eBeam-EVO ERRORERROR Metal evaporator of CMOS compatible metals
Green
  +  
NANO Wirebond-Ball-MEI ERRORERROR Gold ball bonder for device packaging
Red
  +  
ICL Oxford-100_PECVD ERRORERROR Dual chamber PECVD and plasma etch tool
Red
  +  
ICL Oxford-100_Etch ERRORERROR Dual chamber PECVD and plasma etch tool
Red
  +  
ICL semZeiss ERRORERROR Scanning Electron Microscope
Red &Green
  +  
ICL TMAH-KOHhood ERRORERROR Silicon bulk wet etching
Red &Green
  +  
ICL wykoICL ERRORERROR Optical profiling system
Green
  +  
TRL acid-hood ERRORERROR Acid processing station
Red &Green
  +  
TRL AJA-TRL ERRORERROR Sputter deposition tool
Red
  +  
TRL asher-TRL ERRORERROR Barrel asher for resist removal
Red &Green
  +  
TRL Balzer-Elionix ERRORERROR SEM or EBL sample preparation
Red
  +  
TRL CCNT ERRORERROR Carbon nanotube growth
Red
  +  
TRL coater ERRORERROR Manual spin-coater for photoresists
Red &Green
  +  
TRL dek-NoAu ERRORERROR Stylus Profilerometer
Green
  +  
TRL dektak-XT ERRORERROR Stylus Profilerometer
Red
  +  
TRL eBeamAu ERRORERROR Metal evaporator
Red
  +  
TRL eBeamFP ERRORERROR Fast pumping metal evaporator
Red
  +  
TRL ellipsometer-TRL ERRORERROR Thin film thickness measurement
Red &Green
  +  
NANO MaskAlign-SoftLitho-EV620 ERRORERROR Contact mask aligner
Red &Green
  +  
TRL EV501 ERRORERROR Bonder system to apply heat, vacuum and pressure
Red &Green
  +  
TRL EV620 ERRORERROR Aligner for bonding
Red &Green
  +  
TRL EV-LC ERRORERROR Contact mask aligner
Red &Green
  +  
TRL Filmetrics-TRL ERRORERROR Thin film thickness measurement
Red &Green
  +  
TRL Greenflo ERRORERROR Acid processing station
Red &Green
  +  
TRL Hall-probe ERRORERROR Carrier measurement
Red
  +  
TRL Heidelberg ERRORERROR Laser direct-write exposure for wafers and masks
Red &Green
  +  
TRL HMDS-TRL ERRORERROR HMDS oven
Red &Green
  +  
TRL hotplate1 ERRORERROR Hotplate for lithography
Red &Green
  +  
TRL hotplate2 ERRORERROR Hotplate for lithography
Red &Green
  +  
TRL hotplate300 ERRORERROR Hotplate for lithography
Red &Green
  +  
TRL IV-probe ERRORERROR Probe station with curve tracer for IV measurement
Red
  +  
NANO MaskAlign-MA6 ERRORERROR Contact mask aligner
Red &Green
  +  
TRL DirectWrite-MLA150-OptAF ERRORERROR Direct-write lithography for wafers and larger pieces
Red &Green
  +  
TRL DirectWrite-MLA150-AirAF ERRORERROR Direct-write lithography for wafers and larger pieces
Red &Green
  +  
TRL nanospec ERRORERROR Thin film thickness measurement
Red &Green
  +  
TRL OAI-Flood ERRORERROR Flood exposure for image reversal resists
Red &Green
  +  
TRL parylene ERRORERROR Parylene depopsition
Red
  +  
TRL photo-wet-Au ERRORERROR Solvent fume hood with sonicator
Red &Green
  +  
TRL photo-wet-l ERRORERROR Wetbench for photoresist development
Red &Green
  +  
TRL photo-wet-r ERRORERROR Wetbench for photoresist development
Red &Green
  +  
TRL plasmaquest ERRORERROR Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
  +  
TRL PMMAspinner ERRORERROR Manual coater for PMMA and other photoresists
Red &Green
  +  
TRL postbake ERRORERROR Bake oven 120C
Red &Green
  +  
TRL prebakeovn ERRORERROR Bake oven 90C
Red &Green
  +  
TRL PZTcoater ERRORERROR Coater to apply PZT films
Red
  +  
TRL PZTfurnace ERRORERROR Bake oven for PZT coated wafers
Red
  +  
TRL Resonetics ERRORERROR Laser ablation system
Red
  +  
TRL RTA-HiT ERRORERROR Rapid Thermal Annealing
Red
  +  
TRL SAMCO ERRORERROR Chlorine based plasma etcher for III-V materials
Red
  +  
TRL SolventHood-TRL ERRORERROR Solvent fume hood
Red &Green
  +  
TRL sts-CVD ERRORERROR PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si
Red
  +  
TRL SU8spinner ERRORERROR Manual spin-coater for SU8 resists
Purple
  +  
TRL TBM-8 ERRORERROR Front-to-back alignement measurement
Red &Green
  +  
TRL UVozone-Au ERRORERROR Cleans residual organics
Red
  +  
TRL varTemp ERRORERROR Bake oven for variable temperature
Red
  +  
TRL WYKO ERRORERROR Optical profiling system
Red &Green
  +  
TRL XeF2 ERRORERROR XeF2 isotropic etching of silicon
Red
  +  
NANO Wirebond-Auto ERRORERROR Automated wirebonder
Red
  +  
NANO Wirebond-Ball-Westbond ERRORERROR Manual ball bonder
Red
  +  
NANO Wirebond-Wedge ERRORERROR Manual wedge bonder
Red
  +  
NANO XRay-Inspection ERRORERROR X-Ray imaging
Red
  +  
NANO DieBonder-PickAndPlace ERRORERROR Automated pick and place
Red
  +  
NANO Clean-Ar-Plasma ERRORERROR Plasma parts cleaning
Red
  +  
NANO Oven-Reflow ERRORERROR Reflow oven
Red
  +  
NANO Microscope-QuickVision ERRORERROR Automated imaging microscope
Red
  +  
NANO Interference-LloydsMirror ERRORERROR 0
Red &Green
  +  
NANO AIR_Bladecoater ERRORERROR 0
Red
  +  
NANO AIR_FOM ERRORERROR 0
Red
  +  
NANO AIR_Spincoater ERRORERROR 0
Red
  +  
NANO GB_Solar_Sim ERRORERROR 0
Red
  +  
NANO GB_Spincoater ERRORERROR 0
Red
  +  
NANO GB_Metals_Evaporator ERRORERROR 0
Red
  +  
NANO GB_Organics_Evaporator ERRORERROR 0
Red
  +  
NANO PECVD-Samco-PD220 ERRORERROR Silicon dielectric PECVD deposition
Red &Green
  +  
NANO RIE-F-Samco-230iP ERRORERROR Fluorine based etcher for silicon dielectrics
Red &Green
  +  
NANO Coldplate-Solvent ERRORERROR Coldplate for PMMA developing
Red &Green
  +  
NANO Hotplate-Tower-U10 ERRORERROR Hotplate tower for pre- and post-baking, up to 300 mm
Red &Green
  +  
NANO Hotplate-Tower-U12 ERRORERROR Hotplate tower for pre- and post-baking, up to 150 mm
Red &Green
  +  
NANO Oven-PostBake-U10 ERRORERROR Oven for 120C postbake of photoresists
Red &Green
  +  
NANO Oven-PostBake-U12 ERRORERROR Oven for 120C postbake of photoresists
Red &Green
  +  
NANO Oven-PreBake-U10 ERRORERROR Oven for 97C prebake of photoresists
Red &Green
  +  
NANO Oven-PreBake-U12 ERRORERROR Oven for 97C prebake of photoresists
Red &Green
  +  
NANO Spinner-AllPurpose ERRORERROR All purpose spinner for user-supplied resist and small samples
Red &Green
  +  
NANO Spinner-EBL ERRORERROR Spinner for white-light compatible ebeam litho resists PMMA and HSQ
Red &Green
  +  
NANO Develop-L08 ERRORERROR Fumehood for resist developing
Red &Green
  +  
NANO Develop-U10 ERRORERROR Fumehood for resist developing
Red &Green
  +  
NANO Develop-U12 ERRORERROR Fumehood for resist developing
Red &Green
  +  
NANO EBL-Spinner-Hood-U06 ERRORERROR Solvent fumehood for EBL coating and sample cleaning
Red &Green
  +  
NANO General-Spinner-Hood-U12 ERRORERROR Solvent fumehood for spin coating
Red &Green
  +  
NANO Liftoff-L08 ERRORERROR General purpose solvent hood and liftoff procedures
Red &Green
  +  
NANO Liftoff-L10 ERRORERROR General purpose solvent hood and liftoff procedures
Red &Green
  +  
NANO PhotoPrep-L10 ERRORERROR Solvent fumehood for general purpose lithography preparation
Red &Green
  +  
NANO Resist-Spinner-Hood-U10 ERRORERROR Solvent fumehood for spin coating
Red &Green
  +  
NANO Microscope-Inspect-4k ERRORERROR Inspection microscope with 4k camera, DIC, darkfield, up to 100x objectives
Red &Green
  +  
NANO Microscope-Inspect-HD ERRORERROR Inspection microscope with HD camera, up to 100x objectives
Red &Green
  +  
NANO Cleave-LatticeAx ERRORERROR Aligned sample cleaver for precision indenting and cleaving
Red &Green
  +  
NANO Scribe-Backside ERRORERROR Sample backside scribing tool
Red &Green
  +  
NANO Scribe-Frontside ERRORERROR Sample frontside scribing tool
Red &Green
  +  
NANO Microscope-Stereo-Packaging ERRORERROR Stereoscope for packaging inspection and work
Red &Green
  +  
NANO Microscope-Stereo-SU8 ERRORERROR Stereoscope for placing/peeling/cutting of PDMS
Purple
  +  
NANO Oven-PDMS ERRORERROR Oven for curing PDMS
Purple
  +  
NANO SoftLitho-Develop ERRORERROR SU8 hood for baking
Purple
  +  
NANO SoftLitho-Prep ERRORERROR Fumehood for cleaning and preparing samples for SU8 and PDMS work
Purple
  +  
NANO SU8-Spinner-Hood ERRORERROR Fumehood for SU8 spinning and solvent work
Purple
  +  
NANO Acid-Etch-General-U10 ERRORERROR Acid hood for general purpose acid work
Red &Green
  +  
NANO Acid-Extended-U07 ERRORERROR Acid hood for longer runs
Red &Green
  +  
NANO Acid-PostCMP-U07 ERRORERROR Acid hood for post-CMP sample cleaning
Red &Green
  +  
NANO Acid-PreClean-U06 ERRORERROR Acid bench for RCA and piranha cleaning of up to 6 inch wafers
Red &Green
  +  
NANO Piranha-U10 ERRORERROR Acid bench for piranha cleaning
Red &Green
  +  
NANO Plating-U04 ERRORERROR Electroplating wet bench and fume hood
Red &Green
  +  
NANO SiliconEtch-KOH-L06 ERRORERROR Corrosive bench for Si etching with KOH
Red &Green
  +  
NANO Solvent-Clean-U06 ERRORERROR Solvent fumehood for sample cleaning including megasonic and CO2
Red &Green
  +  
NANO Solvent-L06 ERRORERROR Solvent hood for general purpose solvent work
Red &Green