New Process

Machines by Specialist: Kurt Broderick


Kurt Broderick
Research Associate, EML Processes
39-217 - (617)253-5241 - kurt@mtl.mit.edu
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
  +  
EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
  +  
NANO Anneal-Tube DiffusionBake Anneal Furnace
Red
  +  
NANO Asher-SoftLitho Photo, SoftLithoClean, PDMS Oxygen Plasma
Red
  +  
NANO Sputter-Balzer DepositionSputter Thin sputter coating of samples
Red
  +  
NANO Anneal-Box DiffusionBake Anneal Furnace
Red
  +  
EML coater-EML PhotoCoat Photoresist Coater
EML
  +  
NANO Dektak-150 Metrology, SoftLithoProfile, SU8 Surface Profilerometer
Red
  +  
NANO Filmetrics-F20 MetrologyThickness Thin Film Optical Measurement
Red &Green
  +  
EML hotpress PhotoBond Pressing for thermoplastic films
EML
  +  
NANO Ox-Tube-Lindberg DiffusionOxidation Oxidation Furnace
EML
  +  
EML parametric-tester MetrologyElectrical Probe station for electrical measurements
EML
  +  
EML photo-hood-EML WetSolvents Solvent Fume hood for lithography
EML
  +  
EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
  +  
NANO SEM-Neo MetrologySEM Very Basic Electron Microscope
Red
  +  
EML SolventHood-EML WetSolvents Solvent Fume hood for lithography
EML
  +  
NANO Sputter-AJA-ChamberLoad DepositionSputter Sputter deposition tool
Red
  +  
NANO Vacuum-Oven DiffusionBake Temperature controlled vacuum oven
Red
  +  
ICL TMAH-KOHhood WetAcids Silicon bulk wet etching
Red &Green
MTL Procedures-Deposition ProceduresDeposit Deposition of thin films
Red &Green
  +  
NANO Microscope-Stereo-SU8 SoftLithoSU8, Microscope Stereoscope for placing/peeling/cutting of PDMS
Purple
  +  
NANO Mixer-PDMS-Degas SoftLithoPDMS, Mixer Centrifugal mixer for PDMS
Purple
  +  
NANO Oven-PDMS SoftLithoPDMS, Bake Oven for curing PDMS
Purple
  +  
NANO PDMS-Prep SoftLithoPDMS, Fumehood Fumehood for mixing and casting PDMS
Purple
  +  
NANO SoftLitho-Develop SoftLithoSU8, Fumehood SU8 hood for baking
Purple
  +  
NANO SoftLitho-Prep SoftLithoPDMS, Fumehood Fumehood for cleaning and preparing samples for SU8 and PDMS work
Purple
  +  
NANO Spinner-SU8 SoftLithoSU8, Coat SU8 spin coater with plumbed developer/rinse/ebr
Purple
  +  
NANO SU8-Spinner-Hood SoftLithoSU8, Fumehood Fumehood for SU8 spinning and solvent work
Purple