New Process

Machines by Specialist: David Terry


David Terry
Project Technician
39-312 - (617)253-6291 - dterry@mtl.mit.edu
View All

ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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TRL acid-hood WetAcids Acid processing station
Red &Green
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TRL asherMatrix-TRL PhotoClean Single wafer oxygen plasma for photoresist removal
Red
  +  
TRL asher-TRL PhotoClean Barrel asher for resist removal
Red &Green
  +  
TRL coater PhotoCoat Manual spin-coater for photoresists
Red &Green
  +  
TRL dek-NoAu MetrologyProfile Stylus Profilerometer
Green
  +  
TRL dektak-XT MetrologyProfile Stylus Profilerometer
Red
  +  
TRL eBeamAu DepositionEvaporate Metal evaporator
Red
  +  
TRL eBeamFP DepositionEvaporate Fast pumping metal evaporator
Red
  +  
TRL ellipsometer-TRL MetrologyThickness Thin film thickness measurement
Red &Green
  +  
NANO MaskAlign-SoftLitho-EV620 Photo, SoftLithoExpose, SU8 Contact mask aligner
Red &Green
  +  
TRL EV-LC PhotoExpose Contact mask aligner
Red &Green
  +  
TRL Greenflo WetAcids Acid processing station
Red &Green
  +  
TRL Hall-probe MetrologyElectrical Carrier measurement
Red
  +  
TRL HMDS-TRL PhotoBake HMDS oven
Red &Green
  +  
TRL hotplate1 PhotoBake Hotplate for lithography
Red &Green
  +  
TRL hotplate2 PhotoBake Hotplate for lithography
Red &Green
  +  
TRL hotplate300 PhotoBake Hotplate for lithography
Red &Green
  +  
TRL IV-probe MetrologyElectrical Probe station with curve tracer for IV measurement
Red
  +  
NANO MaskAlign-MA6 PhotoExpose Contact mask aligner
Red &Green
  +  
TRL nanospec MetrologyThickness Thin film thickness measurement
Red &Green
  +  
TRL OAI-Flood PhotoExpose Flood exposure for image reversal resists
Red &Green
  +  
TRL photo-wet-Au WetSolvents Solvent fume hood with sonicator
Red &Green
  +  
TRL photo-wet-l WetSolvents Wetbench for photoresist development
Red &Green
  +  
TRL photo-wet-r WetSolvents Wetbench for photoresist development
Red &Green
  +  
TRL postbake PhotoBake Bake oven 120C
Red &Green
  +  
TRL prebakeovn PhotoBake Bake oven 90C
Red &Green
  +  
TRL SolventHood-TRL WetSolvents Solvent fume hood
Red &Green
  +  
TRL UVozone-Au EtchClean Cleans residual organics
Red
  +  
TRL varTemp PhotoBake Bake oven for variable temperature
Red
  +  
TRL WYKO MetrologyProfile Optical profiling system
Red &Green
  +  
NANO Hotplate-Tower-U10 LithoBake Hotplate tower for pre- and post-baking, up to 300 mm
Red &Green
  +  
NANO Hotplate-Tower-U12 LithoBake Hotplate tower for pre- and post-baking, up to 150 mm
Red &Green
  +  
NANO Oven-PostBake-U10 LithoBake Oven for 120C postbake of photoresists
Red &Green
  +  
NANO Oven-PostBake-U12 LithoBake Oven for 120C postbake of photoresists
Red &Green
  +  
NANO Oven-PreBake-U10 LithoBake Oven for 97C prebake of photoresists
Red &Green
  +  
NANO Oven-PreBake-U12 LithoBake Oven for 97C prebake of photoresists
Red &Green
  +  
NANO Spinner-AllPurpose LithoCoat All purpose spinner for user-supplied resist and small samples
Red &Green
  +  
NANO Spinner-Resist LithoCoat Wafer and large pieces spinner with three plumbed resists
Red &Green
  +  
NANO Develop-L08 LithoDevelop Fumehood for resist developing
Red &Green
  +  
NANO Develop-U10 LithoDevelop Fumehood for resist developing
Red &Green
  +  
NANO Develop-U12 LithoDevelop Fumehood for resist developing
Red &Green
  +  
NANO General-Spinner-Hood-U12 LithoCoat Solvent fumehood for spin coating
Red &Green
  +  
NANO Liftoff-L08 LithoClean General purpose solvent hood and liftoff procedures
Red &Green
  +  
NANO Liftoff-L10 LithoClean General purpose solvent hood and liftoff procedures
Red &Green
  +  
NANO PhotoPrep-L10 LithoTBD Solvent fumehood for general purpose lithography preparation
Red &Green
  +  
NANO Resist-Spinner-Hood-U10 LithoCoat Solvent fumehood for spin coating
Red &Green
  +  
NANO Microscope-Inspect-4k MetrologyInspect Inspection microscope with 4k camera, DIC, darkfield, up to 100x objectives
Red &Green
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NANO Microscope-Inspect-HD MetrologyInspect Inspection microscope with HD camera, up to 100x objectives
Red &Green
  +  
NANO Cleave-LatticeAx MetrologyCleave Aligned sample cleaver for precision indenting and cleaving
Red &Green
  +  
NANO Scribe-Backside MetrologyCleave Sample backside scribing tool
Red &Green
  +  
NANO Scribe-Frontside MetrologyCleave Sample frontside scribing tool
Red &Green
  +  
NANO Solvent-Clean-U06 WetClean Solvent fumehood for sample cleaning including megasonic and CO2
Red &Green
  +  
NANO Solvent-L06 WetClean Solvent hood for general purpose solvent work
Red &Green