New Process

Machines by Specialist: Donal Jamieson


Donal Jamieson
Research Specialist, Vacuum Etching
39-225 - (617)452-2983 - donal@mtl.mit.edu
View All

ProcessLabToolProcess CategorySubcategoryDescription
Color Code
  +  
NANO ALD-AllPurpose DepositionCVD Atomic Layer Deposition
Red
  +  
ICL ALD DepositionCVD Atomic Layer Deposition
Red
  +  
ICL ALD-Oxford DepositionCVD, PECVD Atomic Layer Deposition
Green
  +  
TRL sts1 EtchDRIE Deep reactive ion etcher for silicon
Red
  +  
TRL sts2 EtchDRIE Deep reactive ion etcher for silicon
Green
  +  
TRL sts-CVD DepositionPECVD PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si
Red
  +  
TRL sts-Pegasus EtchDRIE Deep reactive ion etcher for silicon
Red
  +  
NANO PECVD-Samco-PD220 DepositionPECVD Silicon dielectric PECVD deposition
Red &Green