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Machines by Subcategory: SU8

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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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NANO Dektak-150 Metrology, SoftLithoProfile, SU8 Surface Profilerometer
Red
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NANO MaskAlign-SoftLitho-EV620 Photo, SoftLithoExpose, SU8 Contact mask aligner
Red &Green
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NANO Microscope-Stereo-SU8 SoftLithoSU8, Microscope Stereoscope for placing/peeling/cutting of PDMS
Purple
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NANO SoftLitho-Develop SoftLithoSU8, Fumehood SU8 hood for baking
Purple
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NANO Spinner-SU8 SoftLithoSU8, Coat SU8 spin coater with plumbed developer/rinse/ebr
Purple
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NANO SU8-Spinner-Hood SoftLithoSU8, Fumehood Fumehood for SU8 spinning and solvent work
Purple