New Process

Machines by Subcategory: PECVD

Deposits thin films conformally at relatively low temperatures
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
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ICL ALD-Oxford DepositionCVD, PECVD Atomic Layer Deposition
Green
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ICL concept1 DepositionPECVD PECVD deposition of oxides, nitrides, and TEOS
Green
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ICL DCVD DepositionPECVD PECVD deposition of oxides, nitrides, and a-Si
Green
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ICL Oxford-100_PECVD Deposition, EtchPECVD Dual chamber PECVD and plasma etch tool
Red
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TRL CCNT DepositionPECVD Carbon nanotube growth
Red
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TRL sts-CVD DepositionPECVD PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si
Red
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NANO PECVD-Samco-PD220 DepositionPECVD Silicon dielectric PECVD deposition
Red &Green