New Process

Machines by Subcategory: Oxidation

Grow wet or dry oxide in a furnace
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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NANO Ox-Tube-Lindberg DiffusionOxidation Oxidation Furnace
EML
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ICL 5A-GateOx DiffusionOxidation Diffusion tube for gate oxide growth
Green
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ICL 5C-FieldOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
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ICL 5D-ThickOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
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TRL A1-GateOx DiffusionOxidation Thermal Oxidation for Green Silicon Wafers
Green
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TRL A2-WetOxBond DiffusionOxidation Thermal Oxidation and other thermal process for GREEN Si wafers
Green
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TRL B1-Au DiffusionOxidation Gold compatible anneal tube
Red
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TRL B2-Ox-alloy-Poly DiffusionOxidation Thermal Oxidation and LPCVD Polysilicon for RED wafers
Green
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TRL B3-DryOx DiffusionOxidation Thermal Oxidation
Green