New Process

Machines by Subcategory: DRIE

Deep silicon etch, straight sidewalls and high aspect ratios possible
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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TRL sts1 EtchDRIE Deep reactive ion etcher for silicon
Red
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TRL sts2 EtchDRIE Deep reactive ion etcher for silicon
Green
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TRL sts-Pegasus EtchDRIE Deep reactive ion etcher for silicon
Red