New Process

Machines by Subcategory: Coat

Spreads a uniform coat of liquid, usually photoresist, on a flat substrate
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EML coater-EML PhotoCoat Photoresist Coater
EML
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ICL pTrack PhotoCoat Automated coater and developer track
Green
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TRL coater PhotoCoat Manual spin-coater for photoresists
Red &Green
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TRL develop-Brewer PhotoCoat Resist develop and postbake
Red &Green
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TRL PMMAspinner PhotoCoat Manual coater for PMMA and other photoresists
Red &Green
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TRL SU8spinner PhotoCoat Manual spin-coater for SU8 resists
Purple
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NANO Spinner-AllPurpose LithoCoat All purpose spinner for user-supplied resist and small samples
Red &Green
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NANO Spinner-EBL LithoCoat Spinner for white-light compatible ebeam litho resists PMMA and HSQ
Red &Green
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NANO Spinner-Resist LithoCoat Wafer and large pieces spinner with three plumbed resists
Red &Green
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NANO EBL-Spinner-Hood-U06 LithoCoat Solvent fumehood for EBL coating and sample cleaning
Red &Green
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NANO General-Spinner-Hood-U12 LithoCoat Solvent fumehood for spin coating
Red &Green
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NANO Resist-Spinner-Hood-U10 LithoCoat Solvent fumehood for spin coating
Red &Green
  +  
NANO Spinner-SU8 SoftLithoSU8, Coat SU8 spin coater with plumbed developer/rinse/ebr
Purple