New Process

Machines by Subcategory: CVD

Deposition of conformal thin films on substrate
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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NANO ALD-AllPurpose DepositionCVD Atomic Layer Deposition
Red
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ICL 6A-nPoly DiffusionCVD Polysilicon deposition tube for n-type poly Si
Green
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ICL 6B-Poly DiffusionCVD Polysilicon deposition tube for p-type poly Si
Green
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ICL 6C-LTO DiffusionCVD Low temperature CVD oxide deposition
Green
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ICL 6D-Nitride DiffusionCVD Deposition of stoichiometric silicon nitride
Green
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ICL ALD DepositionCVD Atomic Layer Deposition
Red
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ICL ALD-Oxford DepositionCVD, PECVD Atomic Layer Deposition
Green
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ICL epi-Centura DepositionCVD Not open to public
Green
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ICL VTR DiffusionCVD Low stress silicon nitride deposition
Green
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TRL B4-Poly DiffusionCVD LPCVD polysilicon for Green wafers
Green
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TRL parylene DepositionCVD Parylene depopsition
Red