New Process

Machines by Subcategory: Bake

Hardens photoresist
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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NANO Anneal-Tube DiffusionBake Anneal Furnace
Red
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NANO Anneal-Box DiffusionBake Anneal Furnace
Red
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NANO RTA-900C DiffusionBake Rapid Thermal Annealing
Red
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NANO Vacuum-Oven DiffusionBake Temperature controlled vacuum oven
Red
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ICL 5B-Anneal DiffusionBake Annealing tube
Green
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ICL RTA2 DiffusionBake Rapid Thermal Annealing
Green
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ICL RTA-pieces DiffusionBake Rapid Thermal Annealing
Red
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ICL RTP DiffusionBake Rapid Thermal Annealing
Green
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ICL RTP-Si DiffusionBake Rapid Thermal Annealing
Green
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TRL A3-Sinter DiffusionBake Sintering for GREEN Si wafers
Green
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TRL A4-III-Vanneal DiffusionBake Annealing for GREEN III-V samples
Red
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TRL HMDS-TRL PhotoBake HMDS oven
Red &Green
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TRL hotplate1 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate2 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate300 PhotoBake Hotplate for lithography
Red &Green
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TRL postbake PhotoBake Bake oven 120C
Red &Green
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TRL prebakeovn PhotoBake Bake oven 90C
Red &Green
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TRL PZTfurnace DepositionBake Bake oven for PZT coated wafers
Red
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TRL RTA-HiT DiffusionBake Rapid Thermal Annealing
Red
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TRL SU8oven PhotoBake Oven to dry foil from SU8 coater
Purple
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TRL varTemp PhotoBake Bake oven for variable temperature
Red
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NANO Oven-Reflow PackagingBake, LEAP Reflow oven
Red
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NANO Hotplate-Tower-U10 LithoBake Hotplate tower for pre- and post-baking, up to 300 mm
Red &Green
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NANO Hotplate-Tower-U12 LithoBake Hotplate tower for pre- and post-baking, up to 150 mm
Red &Green
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NANO Oven-PostBake-U10 LithoBake Oven for 120C postbake of photoresists
Red &Green
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NANO Oven-PostBake-U12 LithoBake Oven for 120C postbake of photoresists
Red &Green
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NANO Oven-PreBake-U10 LithoBake Oven for 97C prebake of photoresists
Red &Green
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NANO Oven-PreBake-U12 LithoBake Oven for 97C prebake of photoresists
Red &Green
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NANO Oven-PDMS SoftLithoPDMS, Bake Oven for curing PDMS
Purple