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Machines by Location: SoftLitho

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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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NANO Asher-SoftLitho Photo, SoftLithoClean, PDMS Oxygen Plasma
Red
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NANO MaskAlign-SoftLitho-EV620 Photo, SoftLithoExpose, SU8 Contact mask aligner
Red &Green
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NANO Microscope-Stereo-SU8 SoftLithoSU8, Microscope Stereoscope for placing/peeling/cutting of PDMS
Purple
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NANO Mixer-PDMS-Degas SoftLithoPDMS, Mixer Centrifugal mixer for PDMS
Purple
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NANO Oven-PDMS SoftLithoPDMS, Bake Oven for curing PDMS
Purple
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NANO PDMS-Prep SoftLithoPDMS, Fumehood Fumehood for mixing and casting PDMS
Purple
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NANO SoftLitho-Develop SoftLithoSU8, Fumehood SU8 hood for baking
Purple
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NANO SoftLitho-Prep SoftLithoPDMS, Fumehood Fumehood for cleaning and preparing samples for SU8 and PDMS work
Purple
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NANO Spinner-SU8 SoftLithoSU8, Coat SU8 spin coater with plumbed developer/rinse/ebr
Purple
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NANO SU8-Spinner-Hood SoftLithoSU8, Fumehood Fumehood for SU8 spinning and solvent work
Purple