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Machines by Location: 7U

Bldg 12, Lv3 Cleanroom, Bay 7U
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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NANO CMP-GnP WetOther Chemical Mechanical Polishing to planarize surfaces
Red &Green
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NANO Cleave-LatticeAx MetrologyCleave Aligned sample cleaver for precision indenting and cleaving
Red &Green
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NANO Scribe-Backside MetrologyCleave Sample backside scribing tool
Red &Green
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NANO Scribe-Frontside MetrologyCleave Sample frontside scribing tool
Red &Green
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NANO Acid-Extended-U07 WetEtch Acid hood for longer runs
Red &Green
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NANO Acid-PostCMP-U07 WetClean Acid hood for post-CMP sample cleaning
Red &Green