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Machines by Location: 6U

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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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NANO RIE-F-Samco-230iP EtchRIE Fluorine based etcher for silicon dielectrics
Red &Green
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NANO Coldplate-Solvent LithoDevelop Coldplate for PMMA developing
Red &Green
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NANO Spinner-EBL LithoCoat Spinner for white-light compatible ebeam litho resists PMMA and HSQ
Red &Green
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NANO EBL-Spinner-Hood-U06 LithoCoat Solvent fumehood for EBL coating and sample cleaning
Red &Green
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NANO Acid-PreClean-U06 WetClean Acid bench for RCA and piranha cleaning of up to 6 inch wafers
Red &Green
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NANO Solvent-Clean-U06 WetClean Solvent fumehood for sample cleaning including megasonic and CO2
Red &Green