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Machines by Location: 6L

Bldg 12, Lv1 Cleanroom, Bay 6L
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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NANO SRD-L06 WetClean Spin rinse drier for 4, 6, and 8 inch wafers
Red &Green
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NANO NitrideEtch-Phos-L06 WetEtch Acid bench for etching Si3N4 in hot phosphoric acid
Red &Green
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NANO OxideEtch-HF-BOE-L06 WetEtch Acid bench for etching SiO2 in BOE and HF
Red &Green
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NANO Piranha-L06 WetClean Acid bench for piranha cleaning
Red &Green
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NANO RCA-General-L06 WetClean Acid bench for RCA cleaning
Red &Green
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NANO SiliconEtch-KOH-L06 WetEtch Corrosive bench for Si etching with KOH
Red &Green
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NANO Solvent-L06 WetClean Solvent hood for general purpose solvent work
Red &Green
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NANO Ops-ParticleCounter WetClean Particle Counter for staff use
Red &Green
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NANO Computers WetClean Desktop computers in the lab
Red &Green