This room is the 3rd room inside the EML cleanroom, on the south facing side (right side after entering). The official MIT room number is 39-558. The nearest phone is x3-1793 in the hallway.
Machines by Location: 5F 3-South Packaging
|EML||hotpress||Photo||Bond||Pressing for thermoplastic films|
|EML||plasmatherm||Deposition, Etch||PECVD, RIE||Plasma Etch and Deposition|
|TRL||2Dtransfer-platingHood||Wet||Acids||Electroplating wet bench and fume hood|
|ICL||diesaw||Packaging||Physical||Wafer dicing saw|