New Process

Machines by Location: 5F 3-South Packaging

This room is the 3rd room inside the EML cleanroom, on the south facing side (right side after entering). The official MIT room number is 39-558. The nearest phone is x3-1793 in the hallway.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EML hotpress PhotoBond Pressing for thermoplastic films
EML
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EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
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TRL 2Dtransfer-platingHood WetAcids Electroplating wet bench and fume hood
Red
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ICL diesaw PackagingPhysical Wafer dicing saw
Red