New Process

Machines by Location: 4F Photo-South

This room is on the 4th floor of building 39, inside the TRL cleanroom area. This is the second door on the right in the TRL cleanroom hallway, in the "photo area". The official MIT room number is 39-498. The nearest phone is x3-1728 located inside the room, hidden behind the MLA-150.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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TRL dektak-XT MetrologyProfile Stylus Profilerometer
Red
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TRL hotplate1 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate2 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate300 PhotoBake Hotplate for lithography
Red &Green
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TRL DirectWrite-MLA150-OptAF PhotoExpose Direct-write lithography for wafers and larger pieces
Red &Green
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TRL DirectWrite-MLA150-AirAF PhotoExpose Direct-write lithography for wafers and larger pieces
Red &Green
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TRL PZTcoater DepositionSpin-Coat Coater to apply PZT films
Red
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TRL PZTfurnace DepositionBake Bake oven for PZT coated wafers
Red
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TRL SU8oven PhotoBake Oven to dry foil from SU8 coater
Purple
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TRL SU8spinner PhotoCoat Manual spin-coater for SU8 resists
Purple
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TRL UVozone-Au EtchClean Cleans residual organics
Red
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TRL varTemp PhotoBake Bake oven for variable temperature
Red