New Process

Machines by Location: 4F Photo-North

This room is on the 4th floor of building 39, inside the TRL cleanroom area. This is the first door on the right in the TRL cleanroom hallway, in the "photo area". The official MIT room number is 39-498. The nearest phone is x3-0503 located outside the room in the hallway.
View All

ProcessLabToolProcess CategorySubcategoryDescription
Color Code
  +  
TRL coater PhotoCoat Manual spin-coater for photoresists
Red &Green
  +  
TRL develop-Brewer PhotoCoat Resist develop and postbake
Red &Green
  +  
TRL EV-LC PhotoExpose Contact mask aligner
Red &Green
  +  
TRL HMDS-TRL PhotoBake HMDS oven
Red &Green
  +  
TRL OAI-Flood PhotoExpose Flood exposure for image reversal resists
Red &Green
  +  
TRL postbake PhotoBake Bake oven 120C
Red &Green
  +  
TRL prebakeovn PhotoBake Bake oven 90C
Red &Green
  +  
TRL SolventHood-TRL WetSolvents Solvent fume hood
Red &Green