New Process

Machines by Location: 4F Main-South

This room is on the 4th floor of building 39, inside the TRL cleanroom area. This is at the end of the TRL cleanroom, in the "etch area", towards the windows. The official MIT room number is 39-487. The nearest phone is x3-0030 located at the north-west corner by the plasmaquest.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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TRL acid-hood WetAcids Acid processing station
Red &Green
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TRL asherMatrix-TRL PhotoClean Single wafer oxygen plasma for photoresist removal
Red
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TRL rca-TRL DiffusionClean Wafer cleaning before diffusion tubes
Green
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TRL RTA-HiT DiffusionBake Rapid Thermal Annealing
Red
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TRL sts1 EtchDRIE Deep reactive ion etcher for silicon
Red
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TRL sts2 EtchDRIE Deep reactive ion etcher for silicon
Green
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TRL sts-Pegasus EtchDRIE Deep reactive ion etcher for silicon
Red
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TRL XeF2 EtchRIE XeF2 isotropic etching of silicon
Red