New Process

Machines by Location: 4F Main-North

This room is on the 4th floor of building 39, inside the TRL cleanroom area. This is at the end of the TRL cleanroom, in the "etch area", away from the windows. The official MIT room number is 39-487. The nearest phone is x3-0030 located at the north-west corner by the plasmaquest.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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TRL asher-TRL PhotoClean Barrel asher for resist removal
Red &Green
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TRL dek-NoAu MetrologyProfile Stylus Profilerometer
Green
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TRL ellipsometer-TRL MetrologyThickness Thin film thickness measurement
Red &Green
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TRL Filmetrics-TRL MetrologyThickness Thin film thickness measurement
Red &Green
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TRL FLX MetrologyProfile Thin film stress measurement
Red &Green
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TRL IV-probe MetrologyElectrical Probe station with curve tracer for IV measurement
Red
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TRL LAM590-TRL EtchRIE Fluorine based plasma etching of oxide and nitrides
Red
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TRL parylene DepositionCVD Parylene depopsition
Red
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TRL photo-wet-Au WetSolvents Solvent fume hood with sonicator
Red &Green
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TRL photo-wet-l WetSolvents Wetbench for photoresist development
Red &Green
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TRL photo-wet-r WetSolvents Wetbench for photoresist development
Red &Green
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TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
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TRL SAMCO EtchRIE Chlorine based plasma etcher for III-V materials
Red
  +  
TRL WYKO MetrologyProfile Optical profiling system
Red &Green