New Process

Machines by Location: 4F External-Photo

This room is on the 4th floor of building 39, but not inside the regular TRL cleanroom area. Instead, it is accessed from the 4th floor hallway, at the exit towards building 38, and towards NSL. It is the first door on the right, the "Heidelberg room". The official MIT room number is 39-430A. There is a phone (x2-2880) inside the room.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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TRL Balzer-Elionix DepositionSputter SEM or EBL sample preparation
Red
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TRL Heidelberg PhotoExpose Laser direct-write exposure for wafers and masks
Red &Green
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TRL PMMAspinner PhotoCoat Manual coater for PMMA and other photoresists
Red &Green