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Machines by Location: 4F External-Deposition

This room is on the 4th floor of building 39, but not inside the regular TRL cleanroom area. Instead, it is accessed from the 4th floor hallway, at the exit towards building 38, and towards NSL. It is the second door on the right, the "eBeam-FP room". The official MIT room number is 39-428A. There is a phone (x4-3042) inside the room.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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TRL CCNT DepositionPECVD Carbon nanotube growth
Red
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TRL eBeamFP DepositionEvaporate Fast pumping metal evaporator
Red