This room is on the 4th floor of building 39, but not inside the regular TRL cleanroom area. Instead, it is accessed from the 4th floor hallway, at the exit towards building 38, and towards NSL. It is the second door on the right, the "eBeam-FP room". The official MIT room number is 39-428A. There is a phone (x4-3042) inside the room.
Machines by Location: 4F External-Deposition
|TRL||CCNT||Deposition||PECVD||Carbon nanotube growth|
|TRL||eBeamFP||Deposition||Evaporate||Fast pumping metal evaporator|