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Machines by Location: 4F Entry Diffusion

This area is on the 4th floor of building 39, inside the TRL cleanroom area. This area is located immediate after entering the TRL cleanroom area. The official MIT room number is 39-403B. The nearest phone is x3-0503 located in the hallway outside the north photo room.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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TRL A1-GateOx DiffusionOxidation Thermal Oxidation for Green Silicon Wafers
Green
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TRL A2-WetOxBond DiffusionOxidation Thermal Oxidation and other thermal process for GREEN Si wafers
Green
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TRL A3-Sinter DiffusionBake Sintering for GREEN Si wafers
Green
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TRL A4-III-Vanneal DiffusionBake Annealing for GREEN III-V samples
Red
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TRL B1-Au DiffusionOxidation Gold compatible anneal tube
Red
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TRL B2-Ox-alloy-Poly DiffusionOxidation Thermal Oxidation and LPCVD Polysilicon for RED wafers
Green
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TRL B3-DryOx DiffusionOxidation Thermal Oxidation
Green
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TRL B4-Poly DiffusionCVD LPCVD polysilicon for Green wafers
Green
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TRL sts-CVD DepositionPECVD PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si
Red