New Process

Machines by Location: 2F 4-South Diffusion

This room is the 4th equipment bay inside the ICL cleanroom, at the very end of the hallway, on the south facing side (right side after entering). The official MIT room number is 39-267. The nearest phone is x3-0479 located in the hallway between bay 3 and 4.
View All

ProcessLabToolProcess CategorySubcategoryDescription
Color Code
  +  
ICL DCVD DepositionPECVD PECVD deposition of oxides, nitrides, and a-Si
Green
  +  
ICL rca-ICL DiffusionClean Wafer cleaning before diffusion tubes
Green
  +  
ICL RTA2 DiffusionBake Rapid Thermal Annealing
Green
  +  
ICL RTA-pieces DiffusionBake Rapid Thermal Annealing
Red
  +  
ICL RTP DiffusionBake Rapid Thermal Annealing
Green
  +  
ICL RTP-Si DiffusionBake Rapid Thermal Annealing
Green