New Process

Machines by Location: 2F 4-North Diffusion

This room is the 4th equipment bay inside the ICL cleanroom, at the very end of the hallway, on the north facing side (left side after entering). The official MIT room number is 39-267. The nearest phone is x3-0479 located in the hallway between bay 3 and 4.
View All

ProcessLabToolProcess CategorySubcategoryDescription
Color Code
  +  
ICL 5A-GateOx DiffusionOxidation Diffusion tube for gate oxide growth
Green
  +  
ICL 5B-Anneal DiffusionBake Annealing tube
Green
  +  
ICL 5C-FieldOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
  +  
ICL 5D-ThickOx DiffusionOxidation Diffusion tube for wet oxide growth of thicker films
Green
  +  
ICL 6A-nPoly DiffusionCVD Polysilicon deposition tube for n-type poly Si
Green
  +  
ICL 6B-Poly DiffusionCVD Polysilicon deposition tube for p-type poly Si
Green
  +  
ICL 6C-LTO DiffusionCVD Low temperature CVD oxide deposition
Green
  +  
ICL 6D-Nitride DiffusionCVD Deposition of stoichiometric silicon nitride
Green
  +  
ICL VTR DiffusionCVD Low stress silicon nitride deposition
Green