New Process

Machines by Location: 2F 3-South Photo

This room is the 3rd equipment bay inside the ICL cleanroom, on the south facing side (right side after entering). The official MIT room number is 39-261. The nearest phone is x3-0479 located in the hallway between bay 3 and 4.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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ICL asher-ICL PhotoClean Single wafer oxygen plasma for photoresist removal
Green
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ICL pTrack PhotoCoat Automated coater and developer track
Green
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ICL nitrEtch-HotPhos WetAcids Hot phosphoric nitride etch bath
Green
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ICL oxEtch-BOE WetAcids Silicon dioxide etch bath
Green