This room is the 3rd equipment bay inside the ICL cleanroom, on the south facing side (right side after entering). The official MIT room number is 39-261. The nearest phone is x3-0479 located in the hallway between bay 3 and 4.
Machines by Location: 2F 3-South Photo
|ICL||asher-ICL||Photo||Clean||Single wafer oxygen plasma for photoresist removal|
|ICL||pTrack||Photo||Coat||Automated coater and developer track|
|ICL||nitrEtch-HotPhos||Wet||Acids||Hot phosphoric nitride etch bath|
|ICL||oxEtch-BOE||Wet||Acids||Silicon dioxide etch bath|