New Process

Machines by Location: 2F 2-South DepAndEtch

This room is the 2nd equipment bay inside the ICL cleanroom, on the south facing side (right side after entering). The official MIT room number is 39-257. The nearest phone is x3-0976 located in the hallway between bay 1 and 2.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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ICL AME5000 EtchRIE RIE etcher for frontend silicon processes
Green
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ICL premetal-Piranha WetAcids Piranha resist removal and cleaning station
Green