New Process

Machines by Location: 2F 2-North Etch

This room is the 2nd equipment bay inside the ICL cleanroom, on the north facing side (left side after entering). The official MIT room number is 39-291. The nearest phone is x3-0978 located in the hallway between bay 1 and 2.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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ICL AFM MetrologyProfile Atomic Force Microscope for Surface Analysis
Red &Green
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ICL LAM490B EtchRIE Chlorine based plasma etching of silicon
Green
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ICL LAM590-ICL EtchRIE Fluorine based plasma etching of silicon oxide and nitrides
Green