This room is the 2nd equipment bay inside the ICL cleanroom, on the north facing side (left side after entering). The official MIT room number is 39-291. The nearest phone is x3-0978 located in the hallway between bay 1 and 2.
Machines by Location: 2F 2-North Etch
|ICL||AFM||Metrology||Profile||Atomic Force Microscope for Surface Analysis|
|ICL||LAM490B||Etch||RIE||Chlorine based plasma etching of silicon|
|ICL||LAM590-ICL||Etch||RIE||Fluorine based plasma etching of silicon oxide and nitrides|