New Process

Machines by Location: 2F 1-South Metrology

This room is the 1st equipment bay inside the ICL cleanroom, on the south facing side (right side after entering). The official MIT room number is 39-253. The nearest phone is x3-0978 located in the hallway between bay 1 and 2.
View All

ProcessLabToolProcess CategorySubcategoryDescription
Color Code
  +  
ICL 4-pt-probe MetrologyElectrical Sheet resistance measurement of semiconductors
Red
  +  
ICL ALD-Oxford DepositionCVD, PECVD Atomic Layer Deposition
Green
  +  
ICL cv MetrologyElectrical Electrical characterization of dielectrics
Green
  +  
ICL P10 MetrologyProfile Stylus profilerometer
Green
  +  
ICL UV1280 MetrologyThickness Thin film characterization
Green
  +  
ICL wykoICL MetrologyProfile Optical profiling system
Green