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Machines by Location: 2F 1-NorthExtension Deposition

This room is part of the 1st equipment bay inside the ICL cleanroom, on the north facing side (left side after entering). It is directly connected to the 1st bay through a passage. The official MIT room number is 39-204A. The nearest phone is x3-0978 located in the hallway between bay 1 and 2.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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ICL Oxford-100_PECVD Deposition, EtchPECVD Dual chamber PECVD and plasma etch tool
Red
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ICL Oxford-100_Etch Deposition, EtchRIE Dual chamber PECVD and plasma etch tool
Red