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Machines by Location: 2F 1-North Deposition

This room is the 1st equipment bay inside the ICL cleanroom, on the north facing side (left side after entering). The official MIT room number is 39-295. The nearest phone is x3-0978 located in the hallway between bay 1 and 2.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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ICL ALD DepositionCVD Atomic Layer Deposition
Red
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ICL concept1 DepositionPECVD PECVD deposition of oxides, nitrides, and TEOS
Green
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ICL endura DepositionSputter Metal sputter deposition
Green