This room is the 1st equipment bay inside the ICL cleanroom, on the north facing side (left side after entering). The official MIT room number is 39-295. The nearest phone is x3-0978 located in the hallway between bay 1 and 2.
Machines by Location: 2F 1-North Deposition
|ICL||ALD||Deposition||CVD||Atomic Layer Deposition|
|ICL||concept1||Deposition||PECVD||PECVD deposition of oxides, nitrides, and TEOS|
|ICL||endura||Deposition||Sputter||Metal sputter deposition|