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Machines by Location: 12U

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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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NANO MaskAlign-MA6 PhotoExpose Contact mask aligner
Red &Green
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NANO Hotplate-Tower-U12 LithoBake Hotplate tower for pre- and post-baking, up to 150 mm
Red &Green
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NANO Oven-PostBake-U12 LithoBake Oven for 120C postbake of photoresists
Red &Green
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NANO Oven-PreBake-U12 LithoBake Oven for 97C prebake of photoresists
Red &Green
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NANO Spinner-AllPurpose LithoCoat All purpose spinner for user-supplied resist and small samples
Red &Green
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NANO Develop-U12 LithoDevelop Fumehood for resist developing
Red &Green
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NANO General-Spinner-Hood-U12 LithoCoat Solvent fumehood for spin coating
Red &Green