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Machines by Location: 10U

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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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NANO Hotplate-Tower-U10 LithoBake Hotplate tower for pre- and post-baking, up to 300 mm
Red &Green
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NANO Oven-PostBake-U10 LithoBake Oven for 120C postbake of photoresists
Red &Green
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NANO Oven-PreBake-U10 LithoBake Oven for 97C prebake of photoresists
Red &Green
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NANO Spinner-Resist LithoCoat Wafer and large pieces spinner with three plumbed resists
Red &Green
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NANO Develop-U10 LithoDevelop Fumehood for resist developing
Red &Green
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NANO Resist-Spinner-Hood-U10 LithoCoat Solvent fumehood for spin coating
Red &Green
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NANO SRD-U10 WetClean Spin rinse drier for 4, 6, and 8 inch wafers
Red &Green
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NANO Acid-Etch-General-U10 WetEtch Acid hood for general purpose acid work
Red &Green
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NANO Piranha-U10 WetClean Acid bench for piranha cleaning
Red &Green