New Process

Machines by Process Category: SoftLitho

The soft lithography room is located in the class 10k space on the third floor, and provides a workflow for creating PDMS molds from SU8. The east side of the room is geared to SU8 work: hotplates for dehydration and post-exposure bakes, a spinner with plumbed lines for coating and developing of SU8, and a contact aligner for exposing. The west side of the room contains the PDMS processing tools: a hood for weighing, mixing, and casting of PDMS, and a dessicator and oxygen plasma asher for surface preparation. Sample inspection is done with a Nikon microscope with HD camera, and for PDMS work such as cutting or placing, a Nikon stereoscope is available. The PC is used for internet access as well as connection to both of the microscope cameras.
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ProcessLabToolSubcategoryDescription
Color Code
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NANO Asher-SoftLitho Clean, PDMS Oxygen Plasma
Red
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NANO Dektak-150 Profile, SU8 Surface Profilerometer
Red
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NANO MaskAlign-SoftLitho-EV620 Expose, SU8 Contact mask aligner
Red &Green
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NANO Microscope-Stereo-SU8 SU8, Microscope Stereoscope for placing/peeling/cutting of PDMS
Purple
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NANO Mixer-PDMS-Degas PDMS, Mixer Centrifugal mixer for PDMS
Purple
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NANO Oven-PDMS PDMS, Bake Oven for curing PDMS
Purple
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NANO PDMS-Prep PDMS, Fumehood Fumehood for mixing and casting PDMS
Purple
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NANO SoftLitho-Develop SU8, Fumehood SU8 hood for baking
Purple
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NANO SoftLitho-Prep PDMS, Fumehood Fumehood for cleaning and preparing samples for SU8 and PDMS work
Purple
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NANO Spinner-SU8 SU8, Coat SU8 spin coater with plumbed developer/rinse/ebr
Purple
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NANO SU8-Spinner-Hood SU8, Fumehood Fumehood for SU8 spinning and solvent work
Purple