The metrology tools help you understand what you actually did! Key categories are thin film measurement (e.g. Filmetrics-TRL or in EML [filmetrics]), optical and stylus profiling of surface topology (e.g. WYKO, [dektak], or AFM), and electrical measurements (e.g. IV-probe or parametric-tester). Microscopes, SEMs and specialized measurement equipment (e.g. FLX) round off the toolset.

Some tools can measure similar properties (e.g. thin film thickness in the [UV1280], Filmetrics-TRL or nanospec), but different physical principles of operation might make one tool a better choice over the other (e.g. when measuring extremely thin dielectric films, the Filmetrics-TRL while a very easy tool to use, may not be the best choice).

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Process	Lab	Tool	Subcategory	Characteristics	Description	Color Code
+	NANO	Dektak-150	Profile, SU8		Surface Profilerometer	Red
+	NANO	Filmetrics-F20	Thickness	Spectral reflectance	Thin Film Optical Measurement	Red &Green
+	EML	parametric-tester	Electrical		Probe station for electrical measurements	EML
+	NANO	SEM-Neo	SEM	5, 10 and 15 kV	Very Basic Electron Microscope	Red
+	ICL	4-pt-probe	Electrical		Sheet resistance measurement of semiconductors	Red
+	ICL	AFM	Profile		Atomic Force Microscope for Surface Analysis	Red &Green
+	ICL	cv	Electrical	200C	Electrical characterization of dielectrics	Green
+	ICL	P10	RIE		Stylus profilerometer	Green
+	ICL	semZeiss	SEM		Scanning Electron Microscope	Red &Green
+	ICL	SM-300	Thickness	>10 nm films, 200-700 nm	Thickness measurement for CMP processing	Red &Green
+	ICL	wykoICL	Profile		Optical profiling system	Green
+	TRL	dek-NoAu	Profile		Stylus Profilerometer	Green
+	TRL	dektak-XT	Profile		Stylus Profilerometer	Red
+	TRL	ellipsometer-TRL	Thickness		Thin film thickness measurement	Red &Green
+	TRL	Filmetrics-TRL	Thickness	Spectral reflectance method.	Thin film thickness measurement	Red &Green
+	TRL	FLX	Profile		Thin film stress measurement	Red &Green
+	TRL	Hall-probe	Electrical		Carrier measurement	Red
+	TRL	IV-probe	Electrical	20V, 120mA, four terminals	Probe station with curve tracer for IV measurement	Red
+	TRL	nanospec	Thickness		Thin film thickness measurement	Red &Green
+	TRL	WYKO	Profile		Optical profiling system	Red &Green
+	NANO	Microscope-Inspect-4k	Inspect		Inspection microscope with 4k camera, DIC, darkfield, up to 100x objectives	Red &Green
+	NANO	Microscope-Inspect-HD	Inspect		Inspection microscope with HD camera, up to 100x objectives	Red &Green
+	NANO	Cleave-LatticeAx	Cleave		Aligned sample cleaver for precision indenting and cleaving	Red &Green
+	NANO	Scribe-Backside	Cleave		Sample backside scribing tool	Red &Green
+	NANO	Scribe-Frontside	Cleave		Sample frontside scribing tool	Red &Green
+	NANO	Microscope-Stereo-Packaging	Physical		Stereoscope for packaging inspection and work	Red &Green