MENUMachines by Process Category: Metrology
Some tools can measure similar properties (e.g. thin film thickness in the [UV1280], Filmetrics-TRL or nanospec), but different physical principles of operation might make one tool a better choice over the other (e.g. when measuring extremely thin dielectric films, the Filmetrics-TRL while a very easy tool to use, may not be the best choice).
Process | Lab | Tool | Subcategory | Characteristics | Description | |
---|---|---|---|---|---|---|
NANO | Dektak-150 | Profile, SU8 | Surface Profilerometer | |||
NANO | Filmetrics-F20 | Thickness | Spectral reflectance | Thin Film Optical Measurement | ||
EML | parametric-tester | Electrical | Probe station for electrical measurements | |||
NANO | SEM-Neo | SEM | 5, 10 and 15 kV | Very Basic Electron Microscope | ||
ICL | 4-pt-probe | Electrical | Sheet resistance measurement of semiconductors | |||
ICL | AFM | Profile | Atomic Force Microscope for Surface Analysis | |||
ICL | cv | Electrical | 200C | Electrical characterization of dielectrics | ||
ICL | P10 | RIE | Stylus profilerometer | |||
ICL | semZeiss | SEM | Scanning Electron Microscope | |||
ICL | SM-300 | Thickness | >10 nm films, 200-700 nm | Thickness measurement for CMP processing | ||
ICL | wykoICL | Profile | Optical profiling system | |||
TRL | dek-NoAu | Profile | Stylus Profilerometer | |||
TRL | dektak-XT | Profile | Stylus Profilerometer | |||
TRL | ellipsometer-TRL | Thickness | Thin film thickness measurement | |||
TRL | Filmetrics-TRL | Thickness | Spectral reflectance method. | Thin film thickness measurement | ||
TRL | FLX | Profile | Thin film stress measurement | |||
TRL | Hall-probe | Electrical | Carrier measurement | |||
TRL | IV-probe | Electrical | 20V, 120mA, four terminals | Probe station with curve tracer for IV measurement | ||
TRL | nanospec | Thickness | Thin film thickness measurement | |||
TRL | WYKO | Profile | Optical profiling system | |||
NANO | Microscope-Inspect-4k | Inspect | Inspection microscope with 4k camera, DIC, darkfield, up to 100x objectives | |||
NANO | Microscope-Inspect-HD | Inspect | Inspection microscope with HD camera, up to 100x objectives | |||
NANO | Cleave-LatticeAx | Cleave | Aligned sample cleaver for precision indenting and cleaving | |||
NANO | Scribe-Backside | Cleave | Sample backside scribing tool | |||
NANO | Scribe-Frontside | Cleave | Sample frontside scribing tool | |||
NANO | Microscope-Stereo-Packaging | Physical | Stereoscope for packaging inspection and work |