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Machines by Process Category: Litho

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ProcessLabToolSubcategoryDescription
Color Code
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NANO Interference-LloydsMirror Expose 0
Red &Green
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NANO Coldplate-Solvent Develop Coldplate for PMMA developing
Red &Green
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NANO Hotplate-Tower-U10 Bake Hotplate tower for pre- and post-baking, up to 300 mm
Red &Green
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NANO Hotplate-Tower-U12 Bake Hotplate tower for pre- and post-baking, up to 150 mm
Red &Green
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NANO Oven-PostBake-U10 Bake Oven for 120C postbake of photoresists
Red &Green
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NANO Oven-PostBake-U12 Bake Oven for 120C postbake of photoresists
Red &Green
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NANO Oven-PreBake-U10 Bake Oven for 97C prebake of photoresists
Red &Green
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NANO Oven-PreBake-U12 Bake Oven for 97C prebake of photoresists
Red &Green
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NANO Spinner-AllPurpose Coat All purpose spinner for user-supplied resist and small samples
Red &Green
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NANO Spinner-EBL Coat Spinner for white-light compatible ebeam litho resists PMMA and HSQ
Red &Green
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NANO Spinner-Resist Coat Wafer and large pieces spinner with three plumbed resists
Red &Green
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NANO Develop-L08 Develop Fumehood for resist developing
Red &Green
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NANO Develop-U10 Develop Fumehood for resist developing
Red &Green
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NANO Develop-U12 Develop Fumehood for resist developing
Red &Green
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NANO EBL-Spinner-Hood-U06 Coat Solvent fumehood for EBL coating and sample cleaning
Red &Green
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NANO General-Spinner-Hood-U12 Coat Solvent fumehood for spin coating
Red &Green
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NANO Liftoff-L08 Clean General purpose solvent hood and liftoff procedures
Red &Green
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NANO Liftoff-L10 Clean General purpose solvent hood and liftoff procedures
Red &Green
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NANO PhotoPrep-L10 TBD Solvent fumehood for general purpose lithography preparation
Red &Green
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NANO Resist-Spinner-Hood-U10 Coat Solvent fumehood for spin coating
Red &Green