New Process

Machines by Material Keyword: SU8

SU8 is a thick polymer. It has a special status, because not fully cured residues can heavily contaminate plasma chambers.
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
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EML coater-EML PhotoCoat Photoresist Coater
EML
  +  
NANO Filmetrics-F20 MetrologyThickness Thin Film Optical Measurement
Red &Green
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EML photo-hood-EML WetSolvents Solvent Fume hood for lithography
EML
MTL Procedures-Cleaning ProceduresClean Sample Cleaning
Red &Green
MTL Procedures-Lithography ProceduresPhoto Lithography
Red &Green
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TRL ellipsometer-TRL MetrologyThickness Thin film thickness measurement
Red &Green
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NANO MaskAlign-SoftLitho-EV620 Photo, SoftLithoExpose, SU8 Contact mask aligner
Red &Green
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TRL Filmetrics-TRL MetrologyThickness Thin film thickness measurement
Red &Green
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TRL hotplate1 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate2 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate300 PhotoBake Hotplate for lithography
Red &Green
  +  
TRL nanospec MetrologyThickness Thin film thickness measurement
Red &Green
  +  
TRL OAI-Flood PhotoExpose Flood exposure for image reversal resists
Red &Green
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TRL Resonetics PhotoExpose Laser ablation system
Red
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TRL SU8spinner PhotoCoat Manual spin-coater for SU8 resists
Purple
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NANO Microscope-Stereo-SU8 SoftLithoSU8, Microscope Stereoscope for placing/peeling/cutting of PDMS
Purple
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NANO SoftLitho-Develop SoftLithoSU8, Fumehood SU8 hood for baking
Purple
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NANO SoftLitho-Prep SoftLithoPDMS, Fumehood Fumehood for cleaning and preparing samples for SU8 and PDMS work
Purple
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NANO Spinner-SU8 SoftLithoSU8, Coat SU8 spin coater with plumbed developer/rinse/ebr
Purple
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NANO SU8-Spinner-Hood SoftLithoSU8, Fumehood Fumehood for SU8 spinning and solvent work
Purple