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Machines by Material Keyword: Polyimide

Polyimide (regular or photo-definable)
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
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NANO Asher-SoftLitho Photo, SoftLithoClean, PDMS Oxygen Plasma
Red
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EML coater-EML PhotoCoat Photoresist Coater
EML
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NANO Filmetrics-F20 MetrologyThickness Thin Film Optical Measurement
Red &Green
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EML photo-hood-EML WetSolvents Solvent Fume hood for lithography
EML
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EML SolventHood-EML WetSolvents Solvent Fume hood for lithography
EML
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ICL i-stepper PhotoExpose i-line stepper
Red &Green
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ICL UV1280 MetrologyThickness Thin film characterization
Green
MTL Procedures-Cleaning ProceduresClean Sample Cleaning
Red &Green
MTL Procedures-Lithography ProceduresPhoto Lithography
Red &Green
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TRL coater PhotoCoat Manual spin-coater for photoresists
Red &Green
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TRL ellipsometer-TRL MetrologyThickness Thin film thickness measurement
Red &Green
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NANO MaskAlign-SoftLitho-EV620 Photo, SoftLithoExpose, SU8 Contact mask aligner
Red &Green
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TRL EV-LC PhotoExpose Contact mask aligner
Red &Green
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TRL Filmetrics-TRL MetrologyThickness Thin film thickness measurement
Red &Green
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TRL hotplate1 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate2 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate300 PhotoBake Hotplate for lithography
Red &Green
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NANO MaskAlign-MA6 PhotoExpose Contact mask aligner
Red &Green
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TRL nanospec MetrologyThickness Thin film thickness measurement
Red &Green
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TRL OAI-Flood PhotoExpose Flood exposure for image reversal resists
Red &Green
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TRL photo-wet-Au WetSolvents Solvent fume hood with sonicator
Red &Green
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TRL photo-wet-l WetSolvents Wetbench for photoresist development
Red &Green
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TRL photo-wet-r WetSolvents Wetbench for photoresist development
Red &Green
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TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
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TRL PMMAspinner PhotoCoat Manual coater for PMMA and other photoresists
Red &Green
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TRL Resonetics PhotoExpose Laser ablation system
Red
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TRL SolventHood-TRL WetSolvents Solvent fume hood
Red &Green
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TRL varTemp PhotoBake Bake oven for variable temperature
Red