New Process

Machines by Material Keyword: Other Polymers

Any other polymer
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
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NANO Asher-SoftLitho Photo, SoftLithoClean, PDMS Oxygen Plasma
Red
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EML coater-EML PhotoCoat Photoresist Coater
EML
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NANO Filmetrics-F20 MetrologyThickness Thin Film Optical Measurement
Red &Green
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EML hotpress PhotoBond Pressing for thermoplastic films
EML
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EML photo-hood-EML WetSolvents Solvent Fume hood for lithography
EML
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EML SolventHood-EML WetSolvents Solvent Fume hood for lithography
EML
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ICL i-stepper PhotoExpose i-line stepper
Red &Green
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ICL Oxford-100_PECVD Deposition, EtchPECVD Dual chamber PECVD and plasma etch tool
Red
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ICL Oxford-100_Etch Deposition, EtchRIE Dual chamber PECVD and plasma etch tool
Red
MTL Procedures-Cleaning ProceduresClean Sample Cleaning
Red &Green
MTL Procedures-Lithography ProceduresPhoto Lithography
Red &Green
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TRL coater PhotoCoat Manual spin-coater for photoresists
Red &Green
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TRL ellipsometer-TRL MetrologyThickness Thin film thickness measurement
Red &Green
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TRL Filmetrics-TRL MetrologyThickness Thin film thickness measurement
Red &Green
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TRL hotplate1 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate2 PhotoBake Hotplate for lithography
Red &Green
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TRL hotplate300 PhotoBake Hotplate for lithography
Red &Green
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TRL nanospec MetrologyThickness Thin film thickness measurement
Red &Green
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TRL OAI-Flood PhotoExpose Flood exposure for image reversal resists
Red &Green
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TRL parylene DepositionCVD Parylene depopsition
Red
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TRL photo-wet-Au WetSolvents Solvent fume hood with sonicator
Red &Green
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TRL photo-wet-l WetSolvents Wetbench for photoresist development
Red &Green
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TRL photo-wet-r WetSolvents Wetbench for photoresist development
Red &Green
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TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
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TRL PMMAspinner PhotoCoat Manual coater for PMMA and other photoresists
Red &Green
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TRL postbake PhotoBake Bake oven 120C
Red &Green
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TRL prebakeovn PhotoBake Bake oven 90C
Red &Green
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TRL Resonetics PhotoExpose Laser ablation system
Red
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TRL SolventHood-TRL WetSolvents Solvent fume hood
Red &Green
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TRL UVozone-Au EtchClean Cleans residual organics
Red
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TRL varTemp PhotoBake Bake oven for variable temperature
Red
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NANO Microscope-Stereo-SU8 SoftLithoSU8, Microscope Stereoscope for placing/peeling/cutting of PDMS
Purple
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NANO Mixer-PDMS-Degas SoftLithoPDMS, Mixer Centrifugal mixer for PDMS
Purple
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NANO Oven-PDMS SoftLithoPDMS, Bake Oven for curing PDMS
Purple
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NANO PDMS-Prep SoftLithoPDMS, Fumehood Fumehood for mixing and casting PDMS
Purple
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NANO SoftLitho-Develop SoftLithoSU8, Fumehood SU8 hood for baking
Purple
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NANO SoftLitho-Prep SoftLithoPDMS, Fumehood Fumehood for cleaning and preparing samples for SU8 and PDMS work
Purple
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NANO Spinner-SU8 SoftLithoSU8, Coat SU8 spin coater with plumbed developer/rinse/ebr
Purple
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NANO SU8-Spinner-Hood SoftLithoSU8, Fumehood Fumehood for SU8 spinning and solvent work
Purple