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Machines by Material Keyword: None

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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
  +  
NANO Dektak-150 Metrology, SoftLithoProfile, SU8 Surface Profilerometer
Red
  +  
NANO SEM-Neo MetrologySEM Very Basic Electron Microscope
Red
  +  
NANO Vacuum-Oven DiffusionBake Temperature controlled vacuum oven
Red
  +  
ICL AFM MetrologyProfile Atomic Force Microscope for Surface Analysis
Red &Green
  +  
ICL P10 MetrologyProfile Stylus profilerometer
Green
  +  
ICL semZeiss MetrologySEM Scanning Electron Microscope
Red &Green
  +  
ICL wykoICL MetrologyProfile Optical profiling system
Green
  +  
TRL B1-Au DiffusionOxidation Gold compatible anneal tube
Red
  +  
TRL dek-NoAu MetrologyProfile Stylus Profilerometer
Green
  +  
TRL dektak-XT MetrologyProfile Stylus Profilerometer
Red
  +  
TRL FLX MetrologyProfile Thin film stress measurement
Red &Green
  +  
TRL SU8oven PhotoBake Oven to dry foil from SU8 coater
Purple
  +  
TRL TBM-8 PhotoBond Front-to-back alignement measurement
Red &Green
  +  
TRL WYKO MetrologyProfile Optical profiling system
Red &Green
  +  
NANO XRay-Inspection PackagingPhysical, LEAP X-Ray imaging
Red
  +  
NANO DieBonder-PickAndPlace PackagingPhysical, LEAP Automated pick and place
Red
  +  
NANO Clean-Ar-Plasma PackagingClean, LEAP Plasma parts cleaning
Red
  +  
NANO Oven-Reflow PackagingBake, LEAP Reflow oven
Red
  +  
NANO Microscope-QuickVision PackagingPhysical, LEAP Automated imaging microscope
Red
  +  
Other OutsideLab ProceduresGeneral Tools used in outside facilities
Red
  +  
Other CNS ProceduresGeneral Tools used in Harvard CNS
Red
  +  
Other NSL ProceduresGeneral Tools used in NSL bldg 39
Red
  +  
Other SNL ProceduresGeneral Tools used in SNL bldg 37
Red
  +  
NANO Freezer-Packaging PackagingPhysical, LEAP 0
Red
  +  
NANO Interference-LloydsMirror LithoExpose 0
Red &Green
  +  
NANO AIR_Bladecoater NanoMatTBD 0
Red
  +  
NANO AIR_FOM NanoMatTBD 0
Red
  +  
NANO AIR_Spincoater NanoMatTBD 0
Red
  +  
NANO GB_Solar_Sim NanoMatTBD 0
Red
  +  
NANO GB_Spincoater NanoMatTBD 0
Red
  +  
NANO GB_Metals_Evaporator NanoMatTBD 0
Red
  +  
NANO GB_Organics_Evaporator NanoMatTBD 0
Red
  +  
NANO Agilent5500_AFM NanoMatTBD 0
Red
  +  
NANO Cary_UV-Vis_Spec NanoMatTBD 0
Red
  +  
NANO Fluorescence_Spec NanoMatTBD 0
Red
  +  
NANO 4_Point_Probe NanoMatTBD 0
Red
  +  
NANO PECVD-Samco-PD220 DepositionPECVD Silicon dielectric PECVD deposition
Red &Green
  +  
NANO RIE-F-Samco-230iP EtchRIE Fluorine based etcher for silicon dielectrics
Red &Green
  +  
NANO Coldplate-Solvent LithoDevelop Coldplate for PMMA developing
Red &Green
  +  
NANO Hotplate-Tower-U10 LithoBake Hotplate tower for pre- and post-baking, up to 300 mm
Red &Green
  +  
NANO Hotplate-Tower-U12 LithoBake Hotplate tower for pre- and post-baking, up to 150 mm
Red &Green
  +  
NANO Oven-PostBake-U10 LithoBake Oven for 120C postbake of photoresists
Red &Green
  +  
NANO Oven-PostBake-U12 LithoBake Oven for 120C postbake of photoresists
Red &Green
  +  
NANO Oven-PreBake-U10 LithoBake Oven for 97C prebake of photoresists
Red &Green
  +  
NANO Oven-PreBake-U12 LithoBake Oven for 97C prebake of photoresists
Red &Green
  +  
NANO Spinner-AllPurpose LithoCoat All purpose spinner for user-supplied resist and small samples
Red &Green
  +  
NANO Spinner-EBL LithoCoat Spinner for white-light compatible ebeam litho resists PMMA and HSQ
Red &Green
  +  
NANO Spinner-Resist LithoCoat Wafer and large pieces spinner with three plumbed resists
Red &Green
  +  
NANO Develop-L08 LithoDevelop Fumehood for resist developing
Red &Green
  +  
NANO Develop-U10 LithoDevelop Fumehood for resist developing
Red &Green
  +  
NANO Develop-U12 LithoDevelop Fumehood for resist developing
Red &Green
  +  
NANO EBL-Spinner-Hood-U06 LithoCoat Solvent fumehood for EBL coating and sample cleaning
Red &Green
  +  
NANO General-Spinner-Hood-U12 LithoCoat Solvent fumehood for spin coating
Red &Green
  +  
NANO Liftoff-L08 LithoClean General purpose solvent hood and liftoff procedures
Red &Green
  +  
NANO Liftoff-L10 LithoClean General purpose solvent hood and liftoff procedures
Red &Green
  +  
NANO PhotoPrep-L10 LithoTBD Solvent fumehood for general purpose lithography preparation
Red &Green
  +  
NANO Resist-Spinner-Hood-U10 LithoCoat Solvent fumehood for spin coating
Red &Green
  +  
NANO Microscope-Inspect-4k MetrologyInspect Inspection microscope with 4k camera, DIC, darkfield, up to 100x objectives
Red &Green
  +  
NANO Microscope-Inspect-HD MetrologyInspect Inspection microscope with HD camera, up to 100x objectives
Red &Green
  +  
NANO Cleave-LatticeAx MetrologyCleave Aligned sample cleaver for precision indenting and cleaving
Red &Green
  +  
NANO Scribe-Backside MetrologyCleave Sample backside scribing tool
Red &Green
  +  
NANO Scribe-Frontside MetrologyCleave Sample frontside scribing tool
Red &Green
  +  
NANO Microscope-Stereo-Packaging MetrologyPhysical Stereoscope for packaging inspection and work
Red &Green
  +  
NANO Solder-Station PackagingPhysical Solder station for surface mount and rework
Red &Green
  +  
NANO SRD-L06 WetClean Spin rinse drier for 4, 6, and 8 inch wafers
Red &Green
  +  
NANO SRD-U10 WetClean Spin rinse drier for 4, 6, and 8 inch wafers
Red &Green
  +  
NANO Acid-Etch-General-U10 WetEtch Acid hood for general purpose acid work
Red &Green
  +  
NANO Acid-Extended-U07 WetEtch Acid hood for longer runs
Red &Green
  +  
NANO Acid-PostCMP-U07 WetClean Acid hood for post-CMP sample cleaning
Red &Green
  +  
NANO Acid-PreClean-U06 WetClean Acid bench for RCA and piranha cleaning of up to 6 inch wafers
Red &Green
  +  
NANO NitrideEtch-Phos-L06 WetEtch Acid bench for etching Si3N4 in hot phosphoric acid
Red &Green
  +  
NANO OxideEtch-HF-BOE-L06 WetEtch Acid bench for etching SiO2 in BOE and HF
Red &Green
  +  
NANO Piranha-L06 WetClean Acid bench for piranha cleaning
Red &Green
  +  
NANO Piranha-U10 WetClean Acid bench for piranha cleaning
Red &Green
  +  
NANO Plating-U04 WetTBD Electroplating wet bench and fume hood
Red &Green
  +  
NANO RCA-Diffusion-L02 WetClean Acid bench for RCA cleaning before diffusion
Red &Green
  +  
NANO RCA-General-L06 WetClean Acid bench for RCA cleaning
Red &Green
  +  
NANO SiliconEtch-KOH-L06 WetEtch Corrosive bench for Si etching with KOH
Red &Green
  +  
NANO Solvent-Clean-U06 WetClean Solvent fumehood for sample cleaning including megasonic and CO2
Red &Green
  +  
NANO Solvent-L06 WetClean Solvent hood for general purpose solvent work
Red &Green
  +  
NANO Ops-ParticleCounter WetClean Particle Counter for staff use
Red &Green
  +  
NANO Computers WetClean Desktop computers in the lab
Red &Green