New Process

Machines by Material Keyword: Non-Standard Materials

There are many non-standard materials, and often these require the user to know about special processing requirements, to protect the tools and other user's samples from contamination.
View All

ProcessLabToolProcess CategorySubcategoryDescription
Color Code
  +  
EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
  +  
NANO ALD-AllPurpose DepositionCVD Atomic Layer Deposition
Red
  +  
NANO Anneal-Tube DiffusionBake Anneal Furnace
Red
  +  
NANO Anneal-Box DiffusionBake Anneal Furnace
Red
  +  
NANO EBeam-AJA DepositionEvaporate Metal and dielectric evaporator
Red
  +  
NANO Filmetrics-F20 MetrologyThickness Thin Film Optical Measurement
Red &Green
  +  
NANO Ox-Tube-Lindberg DiffusionOxidation Oxidation Furnace
EML
  +  
EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
  +  
NANO RTA-900C DiffusionBake Rapid Thermal Annealing
Red
  +  
EML SolventHood-EML WetSolvents Solvent Fume hood for lithography
EML
  +  
NANO Sputter-AJA-ChamberLoad DepositionSputter Sputter deposition tool
Red
  +  
ICL ALD DepositionCVD Atomic Layer Deposition
Red
  +  
ICL ALD-Oxford DepositionCVD, PECVD Atomic Layer Deposition
Green
MTL Procedures-Cleaning ProceduresClean Sample Cleaning
Red &Green
MTL Procedures-Deposition ProceduresDeposit Deposition of thin films
Red &Green
MTL Procedures-Etching ProceduresEtch Etching of materials
Red &Green
MTL Procedures-Metrology ProceduresMetrology Test and Measurement
Red &Green
  +  
TRL A4-III-Vanneal DiffusionBake Annealing for GREEN III-V samples
Red
  +  
TRL acid-hood WetAcids Acid processing station
Red &Green
  +  
TRL AJA-TRL DepositionSputter Sputter deposition tool
Red
  +  
TRL asher-TRL PhotoClean Barrel asher for resist removal
Red &Green
  +  
TRL CCNT DepositionPECVD Carbon nanotube growth
Red
  +  
TRL eBeamAu DepositionEvaporate Metal evaporator
Red
  +  
TRL ellipsometer-TRL MetrologyThickness Thin film thickness measurement
Red &Green
  +  
TRL Filmetrics-TRL MetrologyThickness Thin film thickness measurement
Red &Green
  +  
TRL Greenflo WetAcids Acid processing station
Red &Green
  +  
TRL nanospec MetrologyThickness Thin film thickness measurement
Red &Green
  +  
TRL parylene DepositionCVD Parylene depopsition
Red
  +  
TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
  +  
TRL PZTcoater DepositionSpin-Coat Coater to apply PZT films
Red
  +  
TRL PZTfurnace DepositionBake Bake oven for PZT coated wafers
Red