New Process

Machines by Material Keyword: Non-CMOS Metals

Metals that are not CMOS compatible, such as gold, copper, and everything not listed in CMOS Metals.
View All

ProcessLabToolProcess CategorySubcategoryDescription
Color Code
  +  
EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
  +  
NANO Anneal-Tube DiffusionBake Anneal Furnace
Red
  +  
NANO Sputter-Balzer DepositionSputter Thin sputter coating of samples
Red
  +  
NANO Anneal-Box DiffusionBake Anneal Furnace
Red
  +  
NANO EBeam-AJA DepositionEvaporate Metal and dielectric evaporator
Red
  +  
EML parametric-tester MetrologyElectrical Probe station for electrical measurements
EML
  +  
EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
  +  
NANO RTA-900C DiffusionBake Rapid Thermal Annealing
Red
  +  
NANO Sputter-AJA-ChamberLoad DepositionSputter Sputter deposition tool
Red
  +  
TRL 2Dtransfer-platingHood WetAcids Electroplating wet bench and fume hood
Red
  +  
ICL 4-pt-probe MetrologyElectrical Sheet resistance measurement of semiconductors
Red
  +  
ICL cv MetrologyElectrical Electrical characterization of dielectrics
Green
  +  
NANO CMP-GnP WetOther Chemical Mechanical Polishing to planarize surfaces
Red &Green
  +  
NANO Wirebond-Ball-MEI PackagingPhysical Gold ball bonder for device packaging
Red
  +  
ICL Oxford-100_PECVD Deposition, EtchPECVD Dual chamber PECVD and plasma etch tool
Red
  +  
ICL Oxford-100_Etch Deposition, EtchRIE Dual chamber PECVD and plasma etch tool
Red
MTL Procedures-Deposition ProceduresDeposit Deposition of thin films
Red &Green
MTL Procedures-Etching ProceduresEtch Etching of materials
Red &Green
MTL Procedures-Metrology ProceduresMetrology Test and Measurement
Red &Green
  +  
TRL A3-Sinter DiffusionBake Sintering for GREEN Si wafers
Green
  +  
TRL acid-hood WetAcids Acid processing station
Red &Green
  +  
TRL AJA-TRL DepositionSputter Sputter deposition tool
Red
  +  
TRL Balzer-Elionix DepositionSputter SEM or EBL sample preparation
Red
  +  
TRL eBeamAu DepositionEvaporate Metal evaporator
Red
  +  
TRL eBeamFP DepositionEvaporate Fast pumping metal evaporator
Red
  +  
TRL Greenflo WetAcids Acid processing station
Red &Green
  +  
TRL Hall-probe MetrologyElectrical Carrier measurement
Red
  +  
TRL IV-probe MetrologyElectrical Probe station with curve tracer for IV measurement
Red
  +  
TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
  +  
TRL Resonetics PhotoExpose Laser ablation system
Red
  +  
TRL RTA-HiT DiffusionBake Rapid Thermal Annealing
Red
  +  
TRL SAMCO EtchRIE Chlorine based plasma etcher for III-V materials
Red
  +  
NANO Wirebond-Auto PackagingPhysical, LEAP Automated wirebonder
Red
  +  
NANO Wirebond-Ball-Westbond PackagingPhysical, LEAP Manual ball bonder
Red
  +  
NANO Wirebond-Wedge PackagingPhysical, LEAP Manual wedge bonder
Red