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Machines by Material Keyword: GaN

Gallium nitride materials
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
  +  
EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
  +  
ICL diesaw PackagingPhysical Wafer dicing saw
Red
  +  
NANO Diesaw-DAD3240 PackagingPhysical Wafer dicing saw
Red
  +  
NANO CMP-GnP WetOther Chemical Mechanical Polishing to planarize surfaces
Red &Green
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ICL rainbow EtchRIE Chlorine based plasma etcher for metals
Green
  +  
ICL SM-300 MetrologyThickness Thickness measurement for CMP processing
Red &Green
MTL Procedures-Cleaning ProceduresClean Sample Cleaning
Red &Green
MTL Procedures-Etching ProceduresEtch Etching of materials
Red &Green
MTL Procedures-Metrology ProceduresMetrology Test and Measurement
Red &Green
  +  
TRL A4-III-Vanneal DiffusionBake Annealing for GREEN III-V samples
Red
  +  
TRL acid-hood WetAcids Acid processing station
Red &Green
  +  
TRL develop-Brewer PhotoCoat Resist develop and postbake
Red &Green
  +  
TRL Greenflo WetAcids Acid processing station
Red &Green
  +  
TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
  +  
TRL RTA-HiT DiffusionBake Rapid Thermal Annealing
Red
  +  
TRL SAMCO EtchRIE Chlorine based plasma etcher for III-V materials
Red