New Process

Machines by Material Keyword: Dielectrics

Any other dielectrics, high or low k
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
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NANO ALD-AllPurpose DepositionCVD Atomic Layer Deposition
Red
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NANO Anneal-Tube DiffusionBake Anneal Furnace
Red
  +  
NANO Anneal-Box DiffusionBake Anneal Furnace
Red
  +  
NANO Filmetrics-F20 MetrologyThickness Thin Film Optical Measurement
Red &Green
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NANO Ox-Tube-Lindberg DiffusionOxidation Oxidation Furnace
EML
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EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
  +  
NANO RTA-900C DiffusionBake Rapid Thermal Annealing
Red
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NANO Sputter-AJA-ChamberLoad DepositionSputter Sputter deposition tool
Red
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ICL 5B-Anneal DiffusionBake Annealing tube
Green
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ICL ALD DepositionCVD Atomic Layer Deposition
Red
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ICL ALD-Oxford DepositionCVD, PECVD Atomic Layer Deposition
Green
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ICL AME5000 EtchRIE RIE etcher for frontend silicon processes
Green
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ICL concept1 DepositionPECVD PECVD deposition of oxides, nitrides, and TEOS
Green
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NANO CMP-GnP WetOther Chemical Mechanical Polishing to planarize surfaces
Red &Green
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ICL LAM490B EtchRIE Chlorine based plasma etching of silicon
Green
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ICL LAM590-ICL EtchRIE Fluorine based plasma etching of silicon oxide and nitrides
Green
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ICL Oxford-100_PECVD Deposition, EtchPECVD Dual chamber PECVD and plasma etch tool
Red
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ICL Oxford-100_Etch Deposition, EtchRIE Dual chamber PECVD and plasma etch tool
Red
  +  
ICL UV1280 MetrologyThickness Thin film characterization
Green
MTL Procedures-Deposition ProceduresDeposit Deposition of thin films
Red &Green
MTL Procedures-Etching ProceduresEtch Etching of materials
Red &Green
MTL Procedures-Metrology ProceduresMetrology Test and Measurement
Red &Green
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TRL A3-Sinter DiffusionBake Sintering for GREEN Si wafers
Green
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TRL acid-hood WetAcids Acid processing station
Red &Green
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TRL AJA-TRL DepositionSputter Sputter deposition tool
Red
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TRL eBeamAu DepositionEvaporate Metal evaporator
Red
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TRL ellipsometer-TRL MetrologyThickness Thin film thickness measurement
Red &Green
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TRL Filmetrics-TRL MetrologyThickness Thin film thickness measurement
Red &Green
  +  
TRL Greenflo WetAcids Acid processing station
Red &Green
  +  
TRL LAM590-TRL EtchRIE Fluorine based plasma etching of oxide and nitrides
Red
  +  
TRL nanospec MetrologyThickness Thin film thickness measurement
Red &Green
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TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
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TRL sts-CVD DepositionPECVD PECVD deposition of oxides, nitrides, a-Si, SiC, and P-doped a-Si
Red