New Process

Machines by Material Keyword: CMOS Metals

CMOS compatible metals, only: Al, Ti, Ni, Pt. (and TiN even if it's not really a metal). Nothing else
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ProcessLabToolProcess CategorySubcategoryDescription
Color Code
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EML acid-hood-EML WetSolvents General Purpose Acid Fume-Hood
EML
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NANO ALD-AllPurpose DepositionCVD Atomic Layer Deposition
Red
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NANO Anneal-Tube DiffusionBake Anneal Furnace
Red
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NANO Anneal-Box DiffusionBake Anneal Furnace
Red
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NANO EBeam-AJA DepositionEvaporate Metal and dielectric evaporator
Red
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EML parametric-tester MetrologyElectrical Probe station for electrical measurements
EML
  +  
EML plasmatherm Deposition, EtchPECVD, RIE Plasma Etch and Deposition
EML
  +  
NANO RTA-900C DiffusionBake Rapid Thermal Annealing
Red
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NANO Sputter-AJA-ChamberLoad DepositionSputter Sputter deposition tool
Red
  +  
TRL 2Dtransfer-platingHood WetAcids Electroplating wet bench and fume hood
Red
  +  
ICL 4-pt-probe MetrologyElectrical Sheet resistance measurement of semiconductors
Red
  +  
ICL 5B-Anneal DiffusionBake Annealing tube
Green
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ICL ALD DepositionCVD Atomic Layer Deposition
Red
  +  
ICL ALD-Oxford DepositionCVD, PECVD Atomic Layer Deposition
Green
  +  
ICL pTrack PhotoCoat Automated coater and developer track
Green
  +  
ICL cv MetrologyElectrical Electrical characterization of dielectrics
Green
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ICL eBeam-EVO DepositionEvaporate Metal evaporator of CMOS compatible metals
Green
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ICL endura DepositionSputter Metal sputter deposition
Green
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NANO CMP-GnP WetOther Chemical Mechanical Polishing to planarize surfaces
Red &Green
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NANO Wirebond-Ball-MEI PackagingPhysical Gold ball bonder for device packaging
Red
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ICL Oxford-100_PECVD Deposition, EtchPECVD Dual chamber PECVD and plasma etch tool
Red
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ICL Oxford-100_Etch Deposition, EtchRIE Dual chamber PECVD and plasma etch tool
Red
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ICL rainbow EtchRIE Chlorine based plasma etcher for metals
Green
  +  
ICL RTA2 DiffusionBake Rapid Thermal Annealing
Green
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ICL RTA-pieces DiffusionBake Rapid Thermal Annealing
Red
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ICL RTP DiffusionBake Rapid Thermal Annealing
Green
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ICL RTP-Si DiffusionBake Rapid Thermal Annealing
Green
MTL Procedures-Deposition ProceduresDeposit Deposition of thin films
Red &Green
MTL Procedures-Etching ProceduresEtch Etching of materials
Red &Green
MTL Procedures-Metrology ProceduresMetrology Test and Measurement
Red &Green
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TRL A3-Sinter DiffusionBake Sintering for GREEN Si wafers
Green
  +  
TRL acid-hood WetAcids Acid processing station
Red &Green
  +  
TRL AJA-TRL DepositionSputter Sputter deposition tool
Red
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TRL eBeamAu DepositionEvaporate Metal evaporator
Red
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TRL eBeamFP DepositionEvaporate Fast pumping metal evaporator
Red
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TRL Greenflo WetAcids Acid processing station
Red &Green
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TRL Hall-probe MetrologyElectrical Carrier measurement
Red
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TRL IV-probe MetrologyElectrical Probe station with curve tracer for IV measurement
Red
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TRL plasmaquest EtchRIE Fluorine and Chlorine general purpose plasma deposition and etch tool
Red
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TRL Resonetics PhotoExpose Laser ablation system
Red
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TRL RTA-HiT DiffusionBake Rapid Thermal Annealing
Red
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TRL SAMCO EtchRIE Chlorine based plasma etcher for III-V materials
Red
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NANO Wirebond-Auto PackagingPhysical, LEAP Automated wirebonder
Red
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NANO Wirebond-Ball-Westbond PackagingPhysical, LEAP Manual ball bonder
Red
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NANO Wirebond-Wedge PackagingPhysical, LEAP Manual wedge bonder
Red